PECVD of thin films: the study of plasma-surface interaction by means of in situ plasma and film diagnostics

Onderzoeksoutput: Bijdrage aan congres › Other › Academic

Originele taal-2	Engels
Status	Gepubliceerd - 2004
Evenement	conference; 47th Annual SVC Technical Conference; 2004-04-30; 2004-04-30 - Duur: 30 apr. 2004 → 30 apr. 2004

Congres	conference; 47th Annual SVC Technical Conference; 2004-04-30; 2004-04-30
Periode	30/04/04 → 30/04/04
Ander	47th Annual SVC Technical Conference

Citeer dit

@conference{b1615c6b211b4bd2a2bf020a67167dba,

title = "PECVD of thin films: the study of plasma-surface interaction by means of in situ plasma and film diagnostics",

author = "\{Sanden, van de\}, M.C.M.",

year = "2004",

language = "English",

note = "conference; 47th Annual SVC Technical Conference; 2004-04-30; 2004-04-30 ; Conference date: 30-04-2004 Through 30-04-2004",

}