PECVD of thin Films: The study of plasma-surface interaction by means of in situ plasma and film diagnostics

Onderzoeksoutput: Bijdrage aan congresOtherAcademic

Originele taal-2Engels
StatusGepubliceerd - 2004
Evenementconference; University of Alabama; 2004-05-06; 2004-05-06 -
Duur: 6 mei 20046 mei 2004

Congres

Congresconference; University of Alabama; 2004-05-06; 2004-05-06
Periode6/05/046/05/04
AnderUniversity of Alabama

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