TY - JOUR
T1 - Particle-in-cell Monte Carlo simulations of an extreme ultraviolet radiation driven plasma
AU - Velden, van der, M.H.L.
AU - Brok, W.J.M.
AU - Mullen, van der, J.J.A.M.
AU - Goedheer, W.J.
AU - Banine, V.Y.
PY - 2006
Y1 - 2006
N2 - A self-consistent kinetic particle-in-cell model has been developed to describe a radiation driven plasma. Collisions between charged species and the neutral background are represented statistically by Monte Carlo collisions. The weakly ionized plasma is formed when extreme UV radiation coming from a pulsed discharge photoionizes a low pressure argon gas. The presence of a plasma close to optical components is potentially dangerous in case the ions that are accelerated in the plasma sheath gain enough energy to sputter the optics. The simulations predict the plasma parameters and notably the energy at which ions impact on the plasma boundaries. Finally, sputter rates are estd. on the basis of two sputtering models. [on SciFinder (R)]
AB - A self-consistent kinetic particle-in-cell model has been developed to describe a radiation driven plasma. Collisions between charged species and the neutral background are represented statistically by Monte Carlo collisions. The weakly ionized plasma is formed when extreme UV radiation coming from a pulsed discharge photoionizes a low pressure argon gas. The presence of a plasma close to optical components is potentially dangerous in case the ions that are accelerated in the plasma sheath gain enough energy to sputter the optics. The simulations predict the plasma parameters and notably the energy at which ions impact on the plasma boundaries. Finally, sputter rates are estd. on the basis of two sputtering models. [on SciFinder (R)]
U2 - 10.1103/PhysRevE.73.036406
DO - 10.1103/PhysRevE.73.036406
M3 - Article
SN - 1539-3755
VL - 73
SP - 036406-1/6
JO - Physical Review E - Statistical, Nonlinear, and Soft Matter Physics
JF - Physical Review E - Statistical, Nonlinear, and Soft Matter Physics
IS - 3
M1 - 036406
ER -