Optimal experiment design for multivariable motion systems: with application to a next-generation wafer stage

Nic Dirkx, Jeroen van de Wijdeven, Tom Oomen

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

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Originele taal-2Engels
TitelJoint Conference 8th IFAC Symposium on Mechatronic Systems and 11th IFAC Symposium on Nonlinear Control Systems
Pagina's1511-1516
Aantal pagina's6
StatusGepubliceerd - 2019
Evenement8th IFAC Symposium on Mechatronic Systems (MECHATRONICS 2019), and 11th IFAC Symposium on Nonlinear Control Systems (NOLCOS 2019) Vienna, Austria - Vienna, Oostenrijk
Duur: 4 sep 20196 sep 2019
http://www.mechatronicsnolcos2019.org/

Congres

Congres8th IFAC Symposium on Mechatronic Systems (MECHATRONICS 2019), and 11th IFAC Symposium on Nonlinear Control Systems (NOLCOS 2019) Vienna, Austria
LandOostenrijk
StadVienna
Periode4/09/196/09/19
Internet adres

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