Optically transparent glass micro-actuator fabricated by femtosecond laser exposure and chemical etching

B.L.K. Lenssen; Y. Bellouard

doi:10.1063/1.4750236

Optically transparent glass micro-actuator fabricated by femtosecond laser exposure and chemical etching

B.L.K. Lenssen
, Y. Bellouard

Onderzoeksoutput: Bijdrage aan tijdschrift › Tijdschriftartikel › Academic › peer review

59 Citaten (Scopus)

476 Downloads (Pure)

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Femtosecond laser manufacturing combined with chemical etching has recently emerged as a flexible platform for fabricating three-dimensional devices and integrated optical elements in glass substrates. Here, we demonstrate an optically transparent micro-actuator fabricated out of a single piece of fused silica. This work paves the road for further functional integration in glass substrate and optically transparent microsystems.

Originele taal-2	Engels
Artikelnummer	103503
Pagina's (van-tot)	103503-1/4
Aantal pagina's	4
Tijdschrift	Applied Physics Letters
Volume	101
Nummer van het tijdschrift	10
DOI's	https://doi.org/10.1063/1.4750236
Status	Gepubliceerd - 2012

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10.1063/1.4750236

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Optically transparent glass micro-actuator fabricated by femtosecond laser exposure and chemical etching

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