Femtosecond laser manufacturing combined with chemical etching has recently emerged as a flexible platform for fabricating three-dimensional devices and integrated optical elements in glass substrates. Here, we demonstrate an optically transparent micro-actuator fabricated out of a single piece of fused silica. This work paves the road for further functional integration in glass substrate and optically transparent microsystems.
Lenssen, B. L. K., & Bellouard, Y. (2012). Optically transparent glass micro-actuator fabricated by femtosecond laser exposure and chemical etching. Applied Physics Letters, 101(10), 103503-1/4. . https://doi.org/10.1063/1.4750236