Optical emission spectroscopy on Ar/N/sub 2/ and Ar/N/sub 2//C/sub 2/H/sub 2/ expanding thermal plasmas

A. Graaf, de; M.C.M. Sanden, van de; D.C. Schram; E. Aldea; G. Dinescu

Optical emission spectroscopy on Ar/N/sub 2/ and Ar/N/sub 2//C/sub 2/H/sub 2/ expanding thermal plasmas

A. Graaf, de, M.C.M. Sanden, van de, D.C. Schram, E. Aldea, G. Dinescu

Plasma & Materials Processing

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This work has been carried out in connection with the possibilities to deposit carbon nitride materials by expansion thermal plasma assisted chemical vapour deposition (ETP-A-CVD). With the same technique high deposition rates and good quality a-Si:H and a-C:H materials have been obtained. A study of the intensity of atomic lines and molecular bands in a Ar/N/sub 2/ and Ar/N/sub 2//C/sub 2/H/sub 2/ expanding thermal plasma has been performed. In the case of the Ar/N/sub 2//C/sub 2/H/sub 2/ mixture rotational and vibrational temperatures were obtained by comparing computer simulated spectra of the CN(B/sup 2/ Sigma -X/sup 2/ Sigma , Delta v=0) spectral system bands with the experimental spectra. The CN ground state density is determined by taking into account the self-absorption of the CN bands

Originele taal-2	Engels
Titel	XXIII International Conference on Phenomena in Ionized Gases, ICPIG Proceedings. Contributed Papers IV
Redacteuren	M.C. Bordage, A. Gleizes
Plaats van productie	Toulouse, France
Uitgeverij	Centre de Phys. Plasmas et leurs Applications de Toulouse
Pagina's	254-255
Status	Gepubliceerd - 1997

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Graaf, de, A., Sanden, van de, M. C. M., Schram, D. C., Aldea, E., & Dinescu, G. (1997). Optical emission spectroscopy on Ar/N/sub 2/ and Ar/N/sub 2//C/sub 2/H/sub 2/ expanding thermal plasmas. In M. C. Bordage, & A. Gleizes (editors), XXIII International Conference on Phenomena in Ionized Gases, ICPIG Proceedings. Contributed Papers IV (blz. 254-255). Centre de Phys. Plasmas et leurs Applications de Toulouse.

Graaf, de, A. ; Sanden, van de, M.C.M. ; Schram, D.C. et al. / Optical emission spectroscopy on Ar/N/sub 2/ and Ar/N/sub 2//C/sub 2/H/sub 2/ expanding thermal plasmas. XXIII International Conference on Phenomena in Ionized Gases, ICPIG Proceedings. Contributed Papers IV . redacteur / M.C. Bordage ; A. Gleizes. Toulouse, France : Centre de Phys. Plasmas et leurs Applications de Toulouse, 1997. blz. 254-255

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title = "Optical emission spectroscopy on Ar/N/sub 2/ and Ar/N/sub 2//C/sub 2/H/sub 2/ expanding thermal plasmas",

abstract = "This work has been carried out in connection with the possibilities to deposit carbon nitride materials by expansion thermal plasma assisted chemical vapour deposition (ETP-A-CVD). With the same technique high deposition rates and good quality a-Si:H and a-C:H materials have been obtained. A study of the intensity of atomic lines and molecular bands in a Ar/N/sub 2/ and Ar/N/sub 2//C/sub 2/H/sub 2/ expanding thermal plasma has been performed. In the case of the Ar/N/sub 2//C/sub 2/H/sub 2/ mixture rotational and vibrational temperatures were obtained by comparing computer simulated spectra of the CN(B/sup 2/ Sigma -X/sup 2/ Sigma , Delta v=0) spectral system bands with the experimental spectra. The CN ground state density is determined by taking into account the self-absorption of the CN bands",

author = "{Graaf, de}, A. and {Sanden, van de}, M.C.M. and D.C. Schram and E. Aldea and G. Dinescu",

year = "1997",

language = "English",

pages = "254--255",

editor = "M.C. Bordage and A. Gleizes",

booktitle = "XXIII International Conference on Phenomena in Ionized Gases, ICPIG Proceedings. Contributed Papers IV",

publisher = "Centre de Phys. Plasmas et leurs Applications de Toulouse",

}

Graaf, de, A, Sanden, van de, MCM , Schram, DC, Aldea, E & Dinescu, G 1997, Optical emission spectroscopy on Ar/N/sub 2/ and Ar/N/sub 2//C/sub 2/H/sub 2/ expanding thermal plasmas. in MC Bordage & A Gleizes (uitgave), XXIII International Conference on Phenomena in Ionized Gases, ICPIG Proceedings. Contributed Papers IV . Centre de Phys. Plasmas et leurs Applications de Toulouse, Toulouse, France, blz. 254-255.

Optical emission spectroscopy on Ar/N/sub 2/ and Ar/N/sub 2//C/sub 2/H/sub 2/ expanding thermal plasmas. / Graaf, de, A.; Sanden, van de, M.C.M.; Schram, D.C. et al.
XXIII International Conference on Phenomena in Ionized Gases, ICPIG Proceedings. Contributed Papers IV . uitgave / M.C. Bordage; A. Gleizes. Toulouse, France: Centre de Phys. Plasmas et leurs Applications de Toulouse, 1997. blz. 254-255.

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic

TY - GEN

T1 - Optical emission spectroscopy on Ar/N/sub 2/ and Ar/N/sub 2//C/sub 2/H/sub 2/ expanding thermal plasmas

AU - Graaf, de, A.

AU - Sanden, van de, M.C.M.

AU - Schram, D.C.

AU - Aldea, E.

AU - Dinescu, G.

PY - 1997

Y1 - 1997

N2 - This work has been carried out in connection with the possibilities to deposit carbon nitride materials by expansion thermal plasma assisted chemical vapour deposition (ETP-A-CVD). With the same technique high deposition rates and good quality a-Si:H and a-C:H materials have been obtained. A study of the intensity of atomic lines and molecular bands in a Ar/N/sub 2/ and Ar/N/sub 2//C/sub 2/H/sub 2/ expanding thermal plasma has been performed. In the case of the Ar/N/sub 2//C/sub 2/H/sub 2/ mixture rotational and vibrational temperatures were obtained by comparing computer simulated spectra of the CN(B/sup 2/ Sigma -X/sup 2/ Sigma , Delta v=0) spectral system bands with the experimental spectra. The CN ground state density is determined by taking into account the self-absorption of the CN bands

AB - This work has been carried out in connection with the possibilities to deposit carbon nitride materials by expansion thermal plasma assisted chemical vapour deposition (ETP-A-CVD). With the same technique high deposition rates and good quality a-Si:H and a-C:H materials have been obtained. A study of the intensity of atomic lines and molecular bands in a Ar/N/sub 2/ and Ar/N/sub 2//C/sub 2/H/sub 2/ expanding thermal plasma has been performed. In the case of the Ar/N/sub 2//C/sub 2/H/sub 2/ mixture rotational and vibrational temperatures were obtained by comparing computer simulated spectra of the CN(B/sup 2/ Sigma -X/sup 2/ Sigma , Delta v=0) spectral system bands with the experimental spectra. The CN ground state density is determined by taking into account the self-absorption of the CN bands

M3 - Conference contribution

SP - 254

EP - 255

BT - XXIII International Conference on Phenomena in Ionized Gases, ICPIG Proceedings. Contributed Papers IV

A2 - Bordage, M.C.

A2 - Gleizes, A.

PB - Centre de Phys. Plasmas et leurs Applications de Toulouse

CY - Toulouse, France

ER -

Graaf, de A, Sanden, van de MCM , Schram DC, Aldea E, Dinescu G. Optical emission spectroscopy on Ar/N/sub 2/ and Ar/N/sub 2//C/sub 2/H/sub 2/ expanding thermal plasmas. In Bordage MC, Gleizes A, redacteurs, XXIII International Conference on Phenomena in Ionized Gases, ICPIG Proceedings. Contributed Papers IV . Toulouse, France: Centre de Phys. Plasmas et leurs Applications de Toulouse. 1997. blz. 254-255

Optical emission spectroscopy on Ar/N/sub 2/ and Ar/N/sub 2//C/sub 2/H/sub 2/ expanding thermal plasmas

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