@inproceedings{42674c90fbee482a83fa06a6d6da392f,
title = "Optical diagnostics for plasma etching",
author = "Th. Bisschops and G.M.W. Kroesen and {van Veldhuizen}, {Eddie M.} and {van de Sande}, M.J.F.",
year = "1984",
language = "English",
series = "Europhysics conference abstracts",
publisher = "European Physical Society (EPS)",
pages = "101--102",
booktitle = "ESCAMPIG 84 :7th European Sectional Conference on the Atomic and Molecular Physics of Ionized Gases : August 28-31, 1984, Bari, Italy",
note = "7th European Sectional Conference on the Atomic and Molecular Physics of ionised Gases (ESCAMPIG 1984) ; Conference date: 28-08-1984 Through 31-08-1984",
}