On the synergistic effect of inorganic/inorganic barrier layers: an ellipsometric porosimetry investigation

M. Aghaee, A. Perrotta, S.A. Starostine, H.W. de Vries, M.C.M. van de Sanden, W.M.M. Kessels, M. Creatore

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2 Citaties (Scopus)

Uittreksel

In this paper, plasma-enhanced chemical vapor deposited SiO2 layers capped by an ultra-thin plasma-assisted atomic layer deposited Al2O3 over-layer are analyzed by means of ellipsometric porosimetry (EP). In a very recent contribution, we have shown that the combination of the two layers provided excellent intrinsic moisture permeation barrier performance down to the 10−5–10−6 g · day−1 · m−2 regime. The present paper therefore addresses the microstructural changes which the SiO2 layers undergo upon Al2O3 deposition, as monitored by ellipsometric porosimetry (EP). It was found that the Al2O3 deposition primarily affects the relative content of open pores with d > 0.3 nm (water as probe) and d > 0.42 nm (ethanol as probe) from 5.35 to 2.81% and from 2.50 to 0.32%, respectively.
Originele taal-2Engels
Artikelnummer1700012
Aantal pagina's9
TijdschriftPlasma Processes and Polymers
Volume14
Nummer van het tijdschrift10
Vroegere onlinedatum24 apr 2017
DOI's
StatusGepubliceerd - 1 okt 2017

Vingerafdruk

barrier layers
Plasmas
Permeation
Ethanol
Moisture
Vapors
Water
probes
moisture
ethyl alcohol
vapors
porosity
water

Citeer dit

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title = "On the synergistic effect of inorganic/inorganic barrier layers: an ellipsometric porosimetry investigation",
abstract = "In this paper, plasma-enhanced chemical vapor deposited SiO2 layers capped by an ultra-thin plasma-assisted atomic layer deposited Al2O3 over-layer are analyzed by means of ellipsometric porosimetry (EP). In a very recent contribution, we have shown that the combination of the two layers provided excellent intrinsic moisture permeation barrier performance down to the 10−5–10−6 g · day−1 · m−2 regime. The present paper therefore addresses the microstructural changes which the SiO2 layers undergo upon Al2O3 deposition, as monitored by ellipsometric porosimetry (EP). It was found that the Al2O3 deposition primarily affects the relative content of open pores with d > 0.3 nm (water as probe) and d > 0.42 nm (ethanol as probe) from 5.35 to 2.81{\%} and from 2.50 to 0.32{\%}, respectively.",
author = "M. Aghaee and A. Perrotta and S.A. Starostine and {de Vries}, H.W. and {van de Sanden}, M.C.M. and W.M.M. Kessels and M. Creatore",
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On the synergistic effect of inorganic/inorganic barrier layers: an ellipsometric porosimetry investigation. / Aghaee, M.; Perrotta, A.; Starostine, S.A.; de Vries, H.W.; van de Sanden, M.C.M.; Kessels, W.M.M.; Creatore, M.

In: Plasma Processes and Polymers, Vol. 14, Nr. 10, 1700012 , 01.10.2017.

Onderzoeksoutput: Bijdrage aan tijdschriftTijdschriftartikelAcademicpeer review

TY - JOUR

T1 - On the synergistic effect of inorganic/inorganic barrier layers: an ellipsometric porosimetry investigation

AU - Aghaee, M.

AU - Perrotta, A.

AU - Starostine, S.A.

AU - de Vries, H.W.

AU - van de Sanden, M.C.M.

AU - Kessels, W.M.M.

AU - Creatore, M.

PY - 2017/10/1

Y1 - 2017/10/1

N2 - In this paper, plasma-enhanced chemical vapor deposited SiO2 layers capped by an ultra-thin plasma-assisted atomic layer deposited Al2O3 over-layer are analyzed by means of ellipsometric porosimetry (EP). In a very recent contribution, we have shown that the combination of the two layers provided excellent intrinsic moisture permeation barrier performance down to the 10−5–10−6 g · day−1 · m−2 regime. The present paper therefore addresses the microstructural changes which the SiO2 layers undergo upon Al2O3 deposition, as monitored by ellipsometric porosimetry (EP). It was found that the Al2O3 deposition primarily affects the relative content of open pores with d > 0.3 nm (water as probe) and d > 0.42 nm (ethanol as probe) from 5.35 to 2.81% and from 2.50 to 0.32%, respectively.

AB - In this paper, plasma-enhanced chemical vapor deposited SiO2 layers capped by an ultra-thin plasma-assisted atomic layer deposited Al2O3 over-layer are analyzed by means of ellipsometric porosimetry (EP). In a very recent contribution, we have shown that the combination of the two layers provided excellent intrinsic moisture permeation barrier performance down to the 10−5–10−6 g · day−1 · m−2 regime. The present paper therefore addresses the microstructural changes which the SiO2 layers undergo upon Al2O3 deposition, as monitored by ellipsometric porosimetry (EP). It was found that the Al2O3 deposition primarily affects the relative content of open pores with d > 0.3 nm (water as probe) and d > 0.42 nm (ethanol as probe) from 5.35 to 2.81% and from 2.50 to 0.32%, respectively.

U2 - 10.1002/ppap.201700012

DO - 10.1002/ppap.201700012

M3 - Article

VL - 14

JO - Plasma Processes and Polymers

JF - Plasma Processes and Polymers

SN - 1612-8850

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