On the route toward 3D-integrated all-solid-state micro-batteries

L. Baggetto; F. Roozeboom; R.A.H. Niessen; P.H.L. Notten

On the route toward 3D-integrated all-solid-state micro-batteries

L. Baggetto
, F. Roozeboom
, R.A.H. Niessen
, P.H.L. Notten

Plasma & Materials Processing

Onderzoeksoutput: Bijdrage aan tijdschrift › Tijdschriftartikel › Academic › peer review

3 Citaten (Scopus)

6 Downloads (Pure)

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The lifetime of 50nm- thick poly- Si anodes was investigated using two different liquid electrolytes, 1M LiClO^sub 4^ salt dissolved in Propylene Carbonate and IM LiPF^sub 6^ dissolved in Ethylene and Diethyl Carbonate, and amorphous Lithium Phosphorus OxyNitride (LiPON) as solidstate electrolyte.

Originele taal-2	Engels
Pagina's (van-tot)	30-35
Tijdschrift	Solid State Technology
Volume	51
Nummer van het tijdschrift	8
Status	Gepubliceerd - 2008

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title = "On the route toward 3D-integrated all-solid-state micro-batteries",

abstract = "The lifetime of 50nm- thick poly- Si anodes was investigated using two different liquid electrolytes, 1M LiClO\textasciicircum{}sub 4\textasciicircum{} salt dissolved in Propylene Carbonate and IM LiPF\textasciicircum{}sub 6\textasciicircum{} dissolved in Ethylene and Diethyl Carbonate, and amorphous Lithium Phosphorus OxyNitride (LiPON) as solidstate electrolyte.",

author = "L. Baggetto and F. Roozeboom and R.A.H. Niessen and P.H.L. Notten",

year = "2008",

language = "English",

volume = "51",

pages = "30--35",

journal = "Solid State Technology",

issn = "0038-111X",

publisher = "Pennwell Corporation",

number = "8",

}

TY - JOUR

T1 - On the route toward 3D-integrated all-solid-state micro-batteries

AU - Baggetto, L.

AU - Roozeboom, F.

AU - Niessen, R.A.H.

AU - Notten, P.H.L.

PY - 2008

Y1 - 2008

N2 - The lifetime of 50nm- thick poly- Si anodes was investigated using two different liquid electrolytes, 1M LiClO^sub 4^ salt dissolved in Propylene Carbonate and IM LiPF^sub 6^ dissolved in Ethylene and Diethyl Carbonate, and amorphous Lithium Phosphorus OxyNitride (LiPON) as solidstate electrolyte.

AB - The lifetime of 50nm- thick poly- Si anodes was investigated using two different liquid electrolytes, 1M LiClO^sub 4^ salt dissolved in Propylene Carbonate and IM LiPF^sub 6^ dissolved in Ethylene and Diethyl Carbonate, and amorphous Lithium Phosphorus OxyNitride (LiPON) as solidstate electrolyte.

M3 - Article

SN - 0038-111X

VL - 51

SP - 30

EP - 35

JO - Solid State Technology

JF - Solid State Technology

IS - 8

ER -

On the route toward 3D-integrated all-solid-state micro-batteries

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