On the accuracy of the Cox-Strack equation and method for contact resistivity determination

Milou van Rijnbach; Raymond J.E. Hueting; Maciej Stodolny; Gaby Janssen; Jimmy Melskens; Jurriaan Schmitz

doi:10.1109/TED.2020.2974194

On the accuracy of the Cox-Strack equation and method for contact resistivity determination

Milou van Rijnbach
, Raymond J.E. Hueting
, Maciej Stodolny
, Gaby Janssen
, Jimmy Melskens
, Jurriaan Schmitz (Corresponding author)

Onderzoeksoutput: Bijdrage aan tijdschrift › Tijdschriftartikel › Academic › peer review

15 Citaten (Scopus)

313 Downloads (Pure)

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The Cox-Strack method is commonly applied to assess the contact resistivity between a metal and a semiconductor since the 1960s, while the underlying assumptions have not yet been rigorously assessed. In this article, a combination of finite-element modeling and mathematical analysis is used to investigate the accuracy of the conventional Cox-Strack equation for generic metal-semiconductor junctions. A systematic error in the spreading resistance equation is quantified, and alternative, more accurate equations are presented. Furthermore, it is shown that commonly used experimental configurations can lead to highly overestimated contact resistivities. Guidelines are formulated for accurate extraction of the contact resistivity from the Cox-Strack measurements.

Originele taal-2	Engels
Artikelnummer	9031713
Pagina's (van-tot)	1757-1763
Aantal pagina's	7
Tijdschrift	IEEE Transactions on Electron Devices
Volume	67
Nummer van het tijdschrift	4
DOI's	https://doi.org/10.1109/TED.2020.2974194
Status	Gepubliceerd - 1 apr. 2020

Financiering

This work was supported by the Topconsortia for Knowledge and Innovation SolarEnergy programof theMinistry of Economic Affairs of The Netherlands through the projects MIRACLE under Grant TEUE116139 and BRIGHT under Grant 1721101. The work of Jimmy Melskens was supported by the Netherlands Organisation for Scientific Research under the Dutch TTW-VENI Grant 15896 Manuscript received January 8, 2020; revised February 12, 2020; accepted February 13, 2020. Date of publication March 10, 2020; date of current version March 24, 2020. This work was supported by the Topcon-sortia for Knowledge and Innovation Solar Energy program of the Ministry of Economic Affairs of The Netherlands through the projects MIRACLE under Grant TEUE116139 and BRIGHT under Grant 1721101. The work of Jimmy Melskens was supported by the Netherlands Organisation for Scientific Research under the Dutch TTW-VENI Grant 15896. The review of this article was arranged by Editor E. A. Gutiérrez-D. (Corresponding author: Jurriaan Schmitz.) Milou van Rijnbach, Raymond J. E. Hueting, and Jurriaan Schmitz are with the MESA+ Institute for Nanotechnology, University of Twente, 7500 AE Enschede, The Netherlands (e-mail: [email protected]).

Financiers	Financiernummer
Ministerie van Economische Zaken en Klimaat	TEUE116139
Nederlandse Organisatie voor Wetenschappelijk Onderzoek	15896

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10.1109/TED.2020.2974194

09031713Definitieve gepubliceerde versie, 1,15 MBLicentie: CC BY

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abstract = "The Cox-Strack method is commonly applied to assess the contact resistivity between a metal and a semiconductor since the 1960s, while the underlying assumptions have not yet been rigorously assessed. In this article, a combination of finite-element modeling and mathematical analysis is used to investigate the accuracy of the conventional Cox-Strack equation for generic metal-semiconductor junctions. A systematic error in the spreading resistance equation is quantified, and alternative, more accurate equations are presented. Furthermore, it is shown that commonly used experimental configurations can lead to highly overestimated contact resistivities. Guidelines are formulated for accurate extraction of the contact resistivity from the Cox-Strack measurements.",

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AB - The Cox-Strack method is commonly applied to assess the contact resistivity between a metal and a semiconductor since the 1960s, while the underlying assumptions have not yet been rigorously assessed. In this article, a combination of finite-element modeling and mathematical analysis is used to investigate the accuracy of the conventional Cox-Strack equation for generic metal-semiconductor junctions. A systematic error in the spreading resistance equation is quantified, and alternative, more accurate equations are presented. Furthermore, it is shown that commonly used experimental configurations can lead to highly overestimated contact resistivities. Guidelines are formulated for accurate extraction of the contact resistivity from the Cox-Strack measurements.

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On the accuracy of the Cox-Strack equation and method for contact resistivity determination

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