On-chip photocurrent displacement sensor based on a waveguide-coupled nanomechanical photonic crystal cavity

Federico Galeotti, Ivana Seršić Vollenbroek, Maurangelo Petruzzella, Francesco M. Pagliano, Frank W.M. van Otten, Žarko Zobenica, Hamed Sadeghian Marnani, Abbas Mohtashami, Rob W. van der Heijden, Andrea Fiore

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

2 Downloads (Pure)

Samenvatting

A nano-opto-electro-mechanical transducer for displacement sensing is presented. It consists of a double-membrane photonic crystal cavity integrated with electro-optical read-out and on-chip light-delivery. The operation is demonstrated by atomic force microscope actuation and photocurrent sensing.

Originele taal-2Engels
Titel2019 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2019
Plaats van productiePiscataway
UitgeverijInstitute of Electrical and Electronics Engineers
Aantal pagina's1
ISBN van elektronische versie9781728104690
DOI's
StatusGepubliceerd - 17 okt 2019
Evenement2019 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2019 - Munich, Duitsland
Duur: 23 jun 201927 jun 2019

Congres

Congres2019 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2019
LandDuitsland
StadMunich
Periode23/06/1927/06/19

Vingerafdruk Duik in de onderzoeksthema's van 'On-chip photocurrent displacement sensor based on a waveguide-coupled nanomechanical photonic crystal cavity'. Samen vormen ze een unieke vingerafdruk.

Citeer dit