Non-hermetic cable design to enable high voltage in low & medium vacuum

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

Samenvatting

Future generation lithography machines require a significant increase in actuation power of the moving stages, in order to ensure the continuous demand for improved productivity. Higher current levels to the actuators could achieve this, but it requires thicker conductors which increases mass and hampers flexibility. Operation of modern extreme ultraviolet (EUV) lithography machines demand a high flexibility of the cables to ensure a lifespan of 109 movements. The option pursued here, therefore, is higher voltage, i.e. a value possibly exceeding the Paschen minimum, whereas the operating pressure may go down to 0.1 Pa.
Originele taal-2Engels
Titel13th International Electrical Insulation Conference, INSUCON 2017
Plaats van productiePiscataway
UitgeverijInstitute of Electrical and Electronics Engineers
Aantal pagina's6
ISBN van elektronische versie978-1-9998-1569-1
DOI's
StatusGepubliceerd - 3 nov 2017
Evenement13th International Electrical Insulation Conference (INSUCON 2017), 16-18 May 2017, Birmingham, United Kingdom - Birmingham, Verenigd Koninkrijk
Duur: 16 mei 201718 mei 2017
https://www.ieee.org/conferences_events/conferences/conferencedetails/index.html?Conf_ID=38042

Congres

Congres13th International Electrical Insulation Conference (INSUCON 2017), 16-18 May 2017, Birmingham, United Kingdom
Verkorte titelINSUCON2017
LandVerenigd Koninkrijk
StadBirmingham
Periode16/05/1718/05/17
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  • Citeer dit

    Driessen, A. B. J. M., van Duivenbode, J., & Wouters, P. A. A. F. (2017). Non-hermetic cable design to enable high voltage in low & medium vacuum. In 13th International Electrical Insulation Conference, INSUCON 2017 [08097193] Institute of Electrical and Electronics Engineers. https://doi.org/10.23919/INSUCON.2017.8097193