Non-hermetic cable connection to enable high voltage in  low & medium vacuum: identification of critical cable interface

A.B.J.M. Driessen; J. van Duivenbode; P.A.A.F. Wouters

doi:10.1109/CEIDP.2016.7785579

Non-hermetic cable connection to enable high voltage in low & medium vacuum: identification of critical cable interface

A.B.J.M. Driessen, J. van Duivenbode, P.A.A.F. Wouters

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic › peer review

4 Citaten (Scopus)

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Higher actuator voltages are required for future generation lithography machines. The operating pressures, down to the medium pressure range, in combination with relevant distances can be situated near gas breakdown according to Paschen curves. Partial discharges may occur, making long-term damage conceivable. Characterization of the partial discharge inception voltage of a cable connection as function of pressure, will reveal limitations. An experimental method is proposed to recognize partial discharges originating from the critical cable interface and is applied for a RG58U cable. The result is characterized in terms of a widened and scaled Paschen curve.

Originele taal-2	Engels
Titel	2016 IEEE Conference on Electrical Insulation and Dielectric Phenomena, 17-20 October 2016, Toronto, Ontario
Plaats van productie	Piscataway
Uitgeverij	Institute of Electrical and Electronics Engineers
Pagina's	424-427
ISBN van elektronische versie	978-1-5090-4654-6
DOI's	https://doi.org/10.1109/CEIDP.2016.7785579
Status	Gepubliceerd - okt. 2016

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10.1109/CEIDP.2016.7785579

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Driessen, A. B. J. M., van Duivenbode, J., & Wouters, P. A. A. F. (2016). Non-hermetic cable connection to enable high voltage in low & medium vacuum: identification of critical cable interface. In 2016 IEEE Conference on Electrical Insulation and Dielectric Phenomena, 17-20 October 2016, Toronto, Ontario (blz. 424-427). Institute of Electrical and Electronics Engineers. https://doi.org/10.1109/CEIDP.2016.7785579

Driessen, A.B.J.M. ; van Duivenbode, J. ; Wouters, P.A.A.F. / Non-hermetic cable connection to enable high voltage in low & medium vacuum : identification of critical cable interface. 2016 IEEE Conference on Electrical Insulation and Dielectric Phenomena, 17-20 October 2016, Toronto, Ontario. Piscataway : Institute of Electrical and Electronics Engineers, 2016. blz. 424-427

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abstract = "Higher actuator voltages are required for future generation lithography machines. The operating pressures, down to the medium pressure range, in combination with relevant distances can be situated near gas breakdown according to Paschen curves. Partial discharges may occur, making long-term damage conceivable. Characterization of the partial discharge inception voltage of a cable connection as function of pressure, will reveal limitations. An experimental method is proposed to recognize partial discharges originating from the critical cable interface and is applied for a RG58U cable. The result is characterized in terms of a widened and scaled Paschen curve.",

author = "A.B.J.M. Driessen and {van Duivenbode}, J. and P.A.A.F. Wouters",

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Driessen, ABJM, van Duivenbode, J & Wouters, PAAF 2016, Non-hermetic cable connection to enable high voltage in low & medium vacuum: identification of critical cable interface. in 2016 IEEE Conference on Electrical Insulation and Dielectric Phenomena, 17-20 October 2016, Toronto, Ontario. Institute of Electrical and Electronics Engineers, Piscataway, blz. 424-427. https://doi.org/10.1109/CEIDP.2016.7785579

Non-hermetic cable connection to enable high voltage in low & medium vacuum: identification of critical cable interface. / Driessen, A.B.J.M.; van Duivenbode, J.; Wouters, P.A.A.F.
2016 IEEE Conference on Electrical Insulation and Dielectric Phenomena, 17-20 October 2016, Toronto, Ontario. Piscataway: Institute of Electrical and Electronics Engineers, 2016. blz. 424-427.

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic › peer review

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N2 - Higher actuator voltages are required for future generation lithography machines. The operating pressures, down to the medium pressure range, in combination with relevant distances can be situated near gas breakdown according to Paschen curves. Partial discharges may occur, making long-term damage conceivable. Characterization of the partial discharge inception voltage of a cable connection as function of pressure, will reveal limitations. An experimental method is proposed to recognize partial discharges originating from the critical cable interface and is applied for a RG58U cable. The result is characterized in terms of a widened and scaled Paschen curve.

AB - Higher actuator voltages are required for future generation lithography machines. The operating pressures, down to the medium pressure range, in combination with relevant distances can be situated near gas breakdown according to Paschen curves. Partial discharges may occur, making long-term damage conceivable. Characterization of the partial discharge inception voltage of a cable connection as function of pressure, will reveal limitations. An experimental method is proposed to recognize partial discharges originating from the critical cable interface and is applied for a RG58U cable. The result is characterized in terms of a widened and scaled Paschen curve.

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Driessen ABJM, van Duivenbode J , Wouters PAAF. Non-hermetic cable connection to enable high voltage in low & medium vacuum: identification of critical cable interface. In 2016 IEEE Conference on Electrical Insulation and Dielectric Phenomena, 17-20 October 2016, Toronto, Ontario. Piscataway: Institute of Electrical and Electronics Engineers. 2016. blz. 424-427 doi: 10.1109/CEIDP.2016.7785579

Non-hermetic cable connection to enable high voltage in low & medium vacuum: identification of critical cable interface

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