Non-hermetic cable connection to enable high voltage in low & medium vacuum: identification of critical cable interface

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Samenvatting

Higher actuator voltages are required for future generation lithography machines. The operating pressures, down to the medium pressure range, in combination with relevant distances can be situated near gas breakdown according to Paschen curves. Partial discharges may occur, making long-term damage conceivable. Characterization of the partial discharge inception voltage of a cable connection as function of pressure, will reveal limitations. An experimental method is proposed to recognize partial discharges originating from the critical cable interface and is applied for a RG58U cable. The result is characterized in terms of a widened and scaled Paschen curve.
Originele taal-2Engels
Titel2016 IEEE Conference on Electrical Insulation and Dielectric Phenomena, 17-20 October 2016, Toronto, Ontario
Plaats van productiePiscataway
UitgeverijInstitute of Electrical and Electronics Engineers
Pagina's424-427
ISBN van elektronische versie978-1-5090-4654-6
DOI's
StatusGepubliceerd - okt 2016

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  • Citeer dit

    Driessen, A. B. J. M., van Duivenbode, J., & Wouters, P. A. A. F. (2016). Non-hermetic cable connection to enable high voltage in low & medium vacuum: identification of critical cable interface. In 2016 IEEE Conference on Electrical Insulation and Dielectric Phenomena, 17-20 October 2016, Toronto, Ontario (blz. 424-427). Institute of Electrical and Electronics Engineers. https://doi.org/10.1109/CEIDP.2016.7785579