Non equilibrium characterization and spectroscopic analysis of an inductively coupled argon plasma

J.J.A.M. Mullen, van der; S. Nowak; A.C.A.P. van Lammeren; D.C. Schram; B. Sijde, van der

doi:10.1016/0584-8547(88)80061-2

Non equilibrium characterization and spectroscopic analysis of an inductively coupled argon plasma

J.J.A.M. Mullen, van der, S. Nowak, A.C.A.P. van Lammeren, D.C. Schram, B. Sijde, van der

Onderzoeksoutput: Bijdrage aan tijdschrift › Tijdschriftartikel › Academic › peer review

33 Citaten (Scopus)

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We have measured local electron density and temperature profiles in an inductively coupled plasma using absolute intensities of highly excited argon states. The electron density profiles are compared with the results of spatially resolved Stark broadening of the H-ß line. By this comparison ionizing and recombining parts of the inductively coupled plasma can be distinguished from each other. The density profile is further investigated for different operating conditions.

Originele taal-2	Engels
Pagina's (van-tot)	317-324
Tijdschrift	Spectrochimica Acta. Part B : Atomic Spectroscopy
Volume	43
Nummer van het tijdschrift	4-5
DOI's	https://doi.org/10.1016/0584-8547(88)80061-2
Status	Gepubliceerd - 1988

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title = "Non equilibrium characterization and spectroscopic analysis of an inductively coupled argon plasma",

abstract = "We have measured local electron density and temperature profiles in an inductively coupled plasma using absolute intensities of highly excited argon states. The electron density profiles are compared with the results of spatially resolved Stark broadening of the H-{\ss} line. By this comparison ionizing and recombining parts of the inductively coupled plasma can be distinguished from each other. The density profile is further investigated for different operating conditions.",

author = "{Mullen, van der}, J.J.A.M. and S. Nowak and {van Lammeren}, A.C.A.P. and D.C. Schram and {Sijde, van der}, B.",

year = "1988",

doi = "10.1016/0584-8547(88)80061-2",

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AU - Mullen, van der, J.J.A.M.

AU - Nowak, S.

AU - van Lammeren, A.C.A.P.

AU - Schram, D.C.

AU - Sijde, van der, B.

PY - 1988

Y1 - 1988

N2 - We have measured local electron density and temperature profiles in an inductively coupled plasma using absolute intensities of highly excited argon states. The electron density profiles are compared with the results of spatially resolved Stark broadening of the H-ß line. By this comparison ionizing and recombining parts of the inductively coupled plasma can be distinguished from each other. The density profile is further investigated for different operating conditions.

AB - We have measured local electron density and temperature profiles in an inductively coupled plasma using absolute intensities of highly excited argon states. The electron density profiles are compared with the results of spatially resolved Stark broadening of the H-ß line. By this comparison ionizing and recombining parts of the inductively coupled plasma can be distinguished from each other. The density profile is further investigated for different operating conditions.

U2 - 10.1016/0584-8547(88)80061-2

DO - 10.1016/0584-8547(88)80061-2

M3 - Article

SN - 0584-8547

VL - 43

SP - 317

EP - 324

JO - Spectrochimica Acta. Part B : Atomic Spectroscopy

JF - Spectrochimica Acta. Part B : Atomic Spectroscopy

IS - 4-5

ER -

Non equilibrium characterization and spectroscopic analysis of an inductively coupled argon plasma

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