NO2 detection and real-time sensing with field-effect transistors

The huge impact of nitrogen dioxide (NO2) emission on public health and the environment is motivating extensive scientific and technological research in the field of NO2 sensing. Field-effect transistors have emerged as a sensitive and reliable technology for monitoring air quality, due to their amplified sensor response. In this review article, the NO2 detection mechanism with field-effect transistors is discussed. The origin is charge trapping at the gate dielectric, yielding a threshold voltage shift. The dynamic response can be described by an analytical model. Implementation in a sensor protocol allows for the fabrication of a functional demonstrator. The sensor, based on a ZnO field-effect transistor, is capable of detecting concentrations as low as 40 ppb of NO2 in real-time. The sensor operates in ambient air, and apart from drying, no further precautions are taken, showing that the fabricated sensor is selective for NO2. The results reviewed in this paper set a precedent for sensing with field-effect transistors.