NbN nanowire superconducting single photon detectors fabricated on MgO substrates

F. Marsili, D.M.J. Bitauld, A. Gaggero, R. Leoni, F. Mattioli, S. Hold, M. Benkahoul, F.A. Lévy, A. Fiore

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

Samenvatting

High sensitivity ultrafast nanowire superconducting single photon detectors (SSPD) in the near infrared wavelength range have been fabricated with ultrathin (3.5nm) NbN films grown on R-plane sapphire substrates by dc reactive magnetron sputtering in Ar+N2 mixture. These results show for the first time that high performance NbN SSPDs can be realized on different substrates and at lower deposition temperature than previously reported, and opens the way to integration with advanced solid state optical structures. SSPDs have been fabricated by a two mask process using electron beam lithography and reactive ion etching on 3.5nm thick NbN films deposited under optimal conditions on MgO.
Originele taal-2Engels
TitelProceedings of the 2007 European Conference on Lasers and Electro-Optics and the International Quantum Electronics Conference (CLEO E-IQEC 2007) 17-22 June 2007, Munich, Germany
Plaats van productiePiscataway, New Jersey, USA
UitgeverijInstitute of Electrical and Electronics Engineers
Pagina's4386606-
ISBN van geprinte versie978-1-424-40931-0
DOI's
StatusGepubliceerd - 2007
EvenementThe European Conference on Lasers and Electro-Optics, CLEO_Europe 2007 - ICM Center of the New Munich Trade Fair Centre, Munich, Duitsland
Duur: 17 jun 200717 jun 2007
http://2007.cleoeurope.org/

Congres

CongresThe European Conference on Lasers and Electro-Optics, CLEO_Europe 2007
Verkorte titelCLEO® 2007
LandDuitsland
StadMunich
Periode17/06/0717/06/07
AnderCLEO 2007, Baltimore, Maryland, USA
Internet adres

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