Multivariable Hx /μ feedback control design for high-precision wafer stage motion

Marc van de Wal (Corresponding author), Gregor van Baars, Frank Sperling, Okko Bosgra

Onderzoeksoutput: Bijdrage aan tijdschriftTijdschriftartikelAcademicpeer review

123 Citaten (Scopus)
2 Downloads (Pure)


Conventional PID-like SISO controllers are still the most common in industry, but with performance requirements becoming tighter there is a growing need for advanced controllers. For the positioning devices in IC-manufacturing, plant interaction is a major performance-limiting factor. MIMO control can be invoked to attack this problem. A practically feasible procedure is presented to design MIMO feedback controllers for electromechanical positioning devices, using H μ techniques. Weighting filters are proposed to straightforwardly and effectively impose performance and uncertainty specifications. Experiments show that MIMO control can considerably improve upon the performance with multiloop SISO control. Some problems are highlighted that are important for industrial practice, but that lack a workable solution.

Originele taal-2Engels
Pagina's (van-tot)739-755
Aantal pagina's17
TijdschriftControl Engineering Practice
Nummer van het tijdschrift7
StatusGepubliceerd - 1 jul 2002
Extern gepubliceerdJa


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