Monte Carlo simulation of a sputtering hollow-cathode discharge for laser applications

S. Karatodorov, D.B. Mihailova, J. Dijk, van, J.J.A.M. Mullen, van der, M. Grozeva

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We report on a kinetic model that computes the electron behaviour in a hollow cathode discharge. It is a part of the PLASIMO toolkit and is based on a Monte-Carlo technique. The model is tested by varying the input parameters and by comparing the output with the output obtained by the freeware Boltzmann equation solver BOLSIG+. The results show that the Monte-Carlo model gives reliable information about the behavior of the electrons in the discharge. The Monte-Carlo module is applied to the case of a hollow cathode discharge for laser applications. Analysis of the output data and its adequateness is done. Future developments of the model are discussed.
Originele taal-2Engels
Pagina's (van-tot)012019-1/4
TijdschriftJournal of Physics: Conference Series
Volume516
Nummer van het tijdschrift1
DOI's
StatusGepubliceerd - 2014

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