Monolithic integration of buried-heterostructures in a generic integrated photonic foundry process

Valeria Rustichelli (Corresponding author), Cosimo Calò, Florian Lemaitre, Stefanos Andreou, Stefanos Andreou, Nicolas Michel, Frederic Pommereau, Huub Ambrosius, Kevin Williams

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This paper demonstrates the integration of buried-heterostructure (BH) lasers and semiconductor optical amplifiers (SOAs) in a generic photonic foundry platform. The process-flow adaptations necessary for their integration with existing building blocks are presented. BH Fabry-Perot lasers fabricated within the platform are fully characterized and compared with shallow-ridge (SR) lasers already available as a standard building block. SR lasers were fabricated on the same wafer sharing the same layer stack. BH lasers showed a reduction in threshold current of 60% and a reduction in thermal resistance of 40%. The full integration is then validated by the characterization of a compact arrayed waveguide grating laser-based transmitter consisting of eight BH-SOAs and a deep-ridge waveguide. A side-mode suppression ratio of up to 57 dB and a linewidth of 1.5 MHz are achieved.

Originele taal-2Engels
Artikelnummer6100808
Aantal pagina's8
TijdschriftIEEE Journal of Selected Topics in Quantum Electronics
Volume25
Nummer van het tijdschrift5
DOI's
StatusGepubliceerd - 1 sep 2019

Vingerafdruk

foundries
Foundries
Photonics
Heterojunctions
photonics
Lasers
lasers
ridges
Semiconductor optical amplifiers
light amplifiers
platforms
waveguides
Arrayed waveguide gratings
Ridge waveguides
thermal resistance
threshold currents
Heat resistance
Linewidth
transmitters
Transmitters

Citeer dit

Rustichelli, Valeria ; Calò, Cosimo ; Lemaitre, Florian ; Andreou, Stefanos ; Andreou, Stefanos ; Michel, Nicolas ; Pommereau, Frederic ; Ambrosius, Huub ; Williams, Kevin. / Monolithic integration of buried-heterostructures in a generic integrated photonic foundry process. In: IEEE Journal of Selected Topics in Quantum Electronics. 2019 ; Vol. 25, Nr. 5.
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abstract = "This paper demonstrates the integration of buried-heterostructure (BH) lasers and semiconductor optical amplifiers (SOAs) in a generic photonic foundry platform. The process-flow adaptations necessary for their integration with existing building blocks are presented. BH Fabry-Perot lasers fabricated within the platform are fully characterized and compared with shallow-ridge (SR) lasers already available as a standard building block. SR lasers were fabricated on the same wafer sharing the same layer stack. BH lasers showed a reduction in threshold current of 60{\%} and a reduction in thermal resistance of 40{\%}. The full integration is then validated by the characterization of a compact arrayed waveguide grating laser-based transmitter consisting of eight BH-SOAs and a deep-ridge waveguide. A side-mode suppression ratio of up to 57 dB and a linewidth of 1.5 MHz are achieved.",
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Monolithic integration of buried-heterostructures in a generic integrated photonic foundry process. / Rustichelli, Valeria (Corresponding author); Calò, Cosimo; Lemaitre, Florian; Andreou, Stefanos; Andreou, Stefanos; Michel, Nicolas ; Pommereau, Frederic; Ambrosius, Huub; Williams, Kevin.

In: IEEE Journal of Selected Topics in Quantum Electronics, Vol. 25, Nr. 5, 6100808, 01.09.2019.

Onderzoeksoutput: Bijdrage aan tijdschriftTijdschriftartikelAcademicpeer review

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