Samenvatting
In this paper hydrodynamic and kinetic approaches to model low pressure capacitively coupled complex radiofrequency discharges are discussed and applied to discharges under microgravity. Experiments in the PKE-Nefedov reactor on board the International Space Station, as well as discharges in which gravity is compensated by means of thermophoresis are simulated with a 2-D cylindrically symmetric hydrodynamic model. Kinetic effects are studied with a 1-D Particle-In-Cell plus Monte Carlo model in which capture and scattering by dust grains is included. Simulations with this model address non-local effects and modulated discharges.
Originele taal-2 | Engels |
---|---|
Pagina's (van-tot) | 199-214 |
Aantal pagina's | 16 |
Tijdschrift | Contributions to Plasma Physics |
Volume | 49 |
Nummer van het tijdschrift | 4-5 |
DOI's | |
Status | Gepubliceerd - 2009 |
Extern gepubliceerd | Ja |