Modelling of voids in complex radio frequency plasmas

W.J. Goedheer, V. Land, J. Venema

Onderzoeksoutput: Bijdrage aan tijdschriftTijdschriftartikelAcademicpeer review

11 Citaten (Scopus)

Samenvatting

In this paper hydrodynamic and kinetic approaches to model low pressure capacitively coupled complex radiofrequency discharges are discussed and applied to discharges under microgravity. Experiments in the PKE-Nefedov reactor on board the International Space Station, as well as discharges in which gravity is compensated by means of thermophoresis are simulated with a 2-D cylindrically symmetric hydrodynamic model. Kinetic effects are studied with a 1-D Particle-In-Cell plus Monte Carlo model in which capture and scattering by dust grains is included. Simulations with this model address non-local effects and modulated discharges.

Originele taal-2Engels
Pagina's (van-tot)199-214
Aantal pagina's16
TijdschriftContributions to Plasma Physics
Volume49
Nummer van het tijdschrift4-5
DOI's
StatusGepubliceerd - 2009
Extern gepubliceerdJa

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