Microwave Induced Plasmas (MIPs) are interesting for industrial and academic purposes. In the particular case of surface wave discharges (SWDs), the electromagnetic waves propagate along the plasma-dielectric which acts as a propagating medium. It is important to note that the surface wave is creating the plasma as it propagates, i.e. plasma and electromagnetic aspects interact self-consistently. An essential part of SWDs is the field applicator or launcher, i.e. the metal structure which convert the wave modes coming from the power supplier into surface wave modes. A particular case of SWDs is the coaxial linear microwave dischargs. In this study, we used two dimensional Plasimo module for modeling of a coaxial linear microwave discharge. In this setup there is an antenna in the center of the setup with a quartz tube and air at atmospheric pressure that separate plasma from antenna . In fact plasma acts as an outer conductor of a coaxial waveguide where the microwave power is consumed. So there is a greater plasma volume and it's suitable for application such as large area plasma deposition for thin film solar cell. We show the simulation results for argon plasma generated using coaxial linear microwave discharge. The main results are power density, Electron density, Electron Temperature and electromagnetic fields.
|Status||Gepubliceerd - 2011|