Modeling and control of thermomechanical systems: managing heat-induced deformation in extreme ultraviolet lithography

Daniël Willem Maria Veldman

Onderzoeksoutput: Scriptie › Dissertatie 1 (Onderzoek TU/e / Promotie TU/e)

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Originele taal-2	Engels
Kwalificatie	Doctor in de Filosofie
Toekennende instantie	Mechanical Engineering
Begeleider(s)/adviseur	Nijmeijer, Henk, Promotor Zwart, Hans J., Promotor Fey, Rob H.B., Co-Promotor
Datum van toekenning	11 sep. 2020
Plaats van publicatie	Eindhoven
Uitgever	Technische Universiteit Eindhoven
Gedrukte ISBN's	978-90-386-5091-3
Status	Gepubliceerd - 11 sep. 2020

Proefschrift.

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@phdthesis{54e23470bab2456ebc98e4c620a3314b,

title = "Modeling and control of thermomechanical systems: managing heat-induced deformation in extreme ultraviolet lithography",

author = "Veldman, {Dani{\"e}l Willem Maria}",

note = "Proefschrift.",

year = "2020",

month = sep,

day = "11",

language = "English",

isbn = "978-90-386-5091-3",

publisher = "Technische Universiteit Eindhoven",

type = "Phd Thesis 1 (Research TU/e / Graduation TU/e)",

school = "Mechanical Engineering",

}