Modeling and compensation of asymmetric hysteresis in a piezo actuated metrological AFM

R.J.E. Merry, M. Uyanik, K.R. Koops, M.J.G. Molengraft, van de, M.G.A. Veghel, van, M. Steinbuch

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

9 Citaten (Scopus)
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The manipulation of samples in atomic force microscopes (AFMs) is often performed using piezoelectric actuators. In this paper, a metrological AFM with a 3 degree-of-freedom (DOF) stage driven by piezo-stack actuators is considered. The piezo actuators exhibit hysteresis, which can change the system dynamics and/or acts as a non-linear disturbance on the system. This deteriorates the performance of the AFM. The 3 DOF stage exhibits asymmetric hysteresis, which is modeled by extending the Coleman-Hodgdon model. The asymmetry includes a scan range dependent offset and an asymmetry between the trace and retrace directions. Non-linear multi-variable optimization is employed to derive the optimal generic model for all scan ranges. The proposed extended Coleman-Hodgdon model describes the asymmetric hysteresis over all scan ranges with an accuracy of 97%. Based on the model, a feedforward compensation method is developed. Experiments on the metrological AFM show that the application of the hysteresis feedforward largely improves the scanning accuracy.
Originele taal-2Engels
TitelProceedings of the 28th American Control Conference, (ACC '09) 10 - 12 June 2009, St. Louis, MO, USA
Plaats van productiePiscataway, NJ
UitgeverijInstitute of Electrical and Electronics Engineers
ISBN van geprinte versie978-1-4244-4523-3
StatusGepubliceerd - 2009


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