Model-based design of MEMS resonant pressure sensors

Engineering

• Microelectromechanical System 100%
• Pressure Sensor 100%
• Resonator 100%
• Damping Force 16%
• Cellphone 16%
• Resonance Mode 16%
• Frequency Reference 16%
• Residual Gas 16%
• Testing Time 16%
• Crystal Oscillator 16%
• Reliable Operation 8%
• Automotives 8%
• Building Block 8%
• Low Power Consumption 8%
• Inkjet Printing 8%
• System Safety 8%
• Applicability 8%
• Low-Temperature 8%
• Noise Performance 8%
• Phase Noise 8%
• Mode Operation 8%
• Clock Signal 8%
• Numerical Evaluation 8%
• Microelectronics 8%
• High Quality Factor 8%
• Telecommunication 8%
• Cavity Pressure 8%
• Digital Integrated Circuits 8%
• Microsystem 8%
• Sensitive Detection 8%
• Physical Significance 8%
• Molecular Flow 8%

Material Science

• Microelectromechanical System 100%
• Resonator 100%
• Electronic Circuit 8%
• Accelerometer 8%
• Sensitive Detection 8%