Samenvatting
For reaching a high selectivity in plasma etching, it is required to precisely control the plasma ion energy. This can be realized by applying a tailored pulse-shape voltage waveform to the reactor table. Recent research has shown that switched-mode power converters can be used to generate this kind of waveform, with the benefit of increased efficiency compared to the traditional linear amplifier. However, the equivalent electric circuit model of the plasma etching reactor is required in order to do circuit simulation and make an optimized electronic design of such switched-mode power converters. Although several circuit models of the reactor have been presented in previous research, they can not be directly adopted in tailored pulse-shape biasing.
In this paper, a modified equivalent electric circuit model of the reactor is proposed. The plasma behaviour is modelled using the equivalent electric circuit and it is suitable for electric circuit simulation together with the power converter. Both the electrical waveforms and the normalized ion energy distribution can be obtained from the simulation, which are in line with the experimental results.
In this paper, a modified equivalent electric circuit model of the reactor is proposed. The plasma behaviour is modelled using the equivalent electric circuit and it is suitable for electric circuit simulation together with the power converter. Both the electrical waveforms and the normalized ion energy distribution can be obtained from the simulation, which are in line with the experimental results.
Originele taal-2 | Engels |
---|---|
Titel | 12th International Conference on Electrical and Electromechanical Energy Conversion (ECCE Asia 2021) |
Uitgeverij | Institute of Electrical and Electronics Engineers |
Pagina's | 568-573 |
Aantal pagina's | 6 |
ISBN van elektronische versie | 978-1-7281-6344-4 |
ISBN van geprinte versie | 978-1-7281-6345-1 |
DOI's | |
Status | Gepubliceerd - 13 jul. 2021 |
Evenement | 12th Annual Energy Conversion Congress and Exposition, ECCE-Asia 2021 - Virtual, Singapore, Singapore Duur: 24 mei 2021 → 27 mei 2021 Congresnummer: 12 https://ecceasia2021.com/ |
Congres
Congres | 12th Annual Energy Conversion Congress and Exposition, ECCE-Asia 2021 |
---|---|
Verkorte titel | ECCE 2021 |
Land/Regio | Singapore |
Stad | Singapore |
Periode | 24/05/21 → 27/05/21 |
Internet adres |