Modal Identification for Multivariable Motion Systems: Applied to a Prototype Wafer-Stage

Maarten van der Hulst; Rodrigo González; Koen Classens; P.J.M.M. Tacx; N.J. Dirkx; J.J.M. van de Wijdeven; Tom A.E. Oomen

Modal Identification for Multivariable Motion Systems: Applied to a Prototype Wafer-Stage

Maarten van der Hulst
, Rodrigo González
, Koen Classens
, P.J.M.M. Tacx
, N.J. Dirkx
, J.J.M. van de Wijdeven
, Tom A.E. Oomen

Onderzoeksoutput: Bijdrage aan congres › Abstract › Academic

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Originele taal-2	Nederlands
Pagina's	13
Aantal pagina's	1
Status	Gepubliceerd - 28 feb 2025
Evenement	44th Benelux Meeting on Systems and Control - Hotel Zuiderduin, Egmond aan Zee, Nederland Duur: 18 mrt 2025 → 20 mrt 2025 Congresnummer: 44 https://www.beneluxmeeting.nl/

Congres

Congres	44th Benelux Meeting on Systems and Control
Verkorte titel	Benelux 2025
Land/Regio	Nederland
Stad	Egmond aan Zee
Periode	18/03/25 → 20/03/25
Internet adres	https://www.beneluxmeeting.nl/

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pdfDefinitieve gepubliceerde versie, 197 KB

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Citeer dit

van der Hulst, M., González, R., Classens, K., Tacx, P. J. M. M., Dirkx, N. J., van de Wijdeven, J. J. M., & Oomen, T. A. E. (2025). Modal Identification for Multivariable Motion Systems: Applied to a Prototype Wafer-Stage. 13. Abstract van 44th Benelux Meeting on Systems and Control, Egmond aan Zee, Nederland. https://www.beneluxmeeting.nl/2025/program/book-of-abstracts

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year = "2025",

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AU - van der Hulst, Maarten

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AU - Classens, Koen

AU - Tacx, P.J.M.M.

AU - Dirkx, N.J.

AU - van de Wijdeven, J.J.M.

AU - Oomen, Tom A.E.

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