Microtransducers

H.J. Leeuwen, van; H.A. Meijer; M.J.W. Schouten

Microtransducers

H.J. Leeuwen, van, H.A. Meijer, M.J.W. Schouten

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Hoofdstuk › Academic › peer review

Samenvatting

Chapter 10 of Thermal Aspects of Fluid Film Tribology by Oscar Pinkus deals with instrumentation techniques for thin film measurements. The chapter on film thickness measurements is dedicated to electrical and optical techniques. The section on microtransducers considers vapor deposited thin layer transducers. Complex transducer patterns can be realized by employing photolithography, allowing local measurements of film thickness, temperature and pressure.

Originele taal-2	Engels
Titel	Thermal aspects of fluid film tribology
Plaats van productie	New York
Uitgeverij	American Society of Mechanical Engineers
Pagina's	404-407
Aantal pagina's	521
ISBN van geprinte versie	0-7918-0011-3
Status	Gepubliceerd - 1990

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title = "Microtransducers",

abstract = "Chapter 10 of Thermal Aspects of Fluid Film Tribology by Oscar Pinkus deals with instrumentation techniques for thin film measurements. The chapter on film thickness measurements is dedicated to electrical and optical techniques. The section on microtransducers considers vapor deposited thin layer transducers. Complex transducer patterns can be realized by employing photolithography, allowing local measurements of film thickness, temperature and pressure.",

author = "{Leeuwen, van}, H.J. and H.A. Meijer and M.J.W. Schouten",

year = "1990",

language = "English",

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publisher = "American Society of Mechanical Engineers",

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T1 - Microtransducers

AU - Leeuwen, van, H.J.

AU - Meijer, H.A.

AU - Schouten, M.J.W.

PY - 1990

Y1 - 1990

N2 - Chapter 10 of Thermal Aspects of Fluid Film Tribology by Oscar Pinkus deals with instrumentation techniques for thin film measurements. The chapter on film thickness measurements is dedicated to electrical and optical techniques. The section on microtransducers considers vapor deposited thin layer transducers. Complex transducer patterns can be realized by employing photolithography, allowing local measurements of film thickness, temperature and pressure.

AB - Chapter 10 of Thermal Aspects of Fluid Film Tribology by Oscar Pinkus deals with instrumentation techniques for thin film measurements. The chapter on film thickness measurements is dedicated to electrical and optical techniques. The section on microtransducers considers vapor deposited thin layer transducers. Complex transducer patterns can be realized by employing photolithography, allowing local measurements of film thickness, temperature and pressure.

M3 - Chapter

SN - 0-7918-0011-3

SP - 404

EP - 407

BT - Thermal aspects of fluid film tribology

PB - American Society of Mechanical Engineers

CY - New York

ER -

Microtransducers

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