Micromolding for ceramic microneedle arrays

S.N. Bystrova, R. Luttge

Onderzoeksoutput: Bijdrage aan tijdschriftTijdschriftartikelAcademicpeer review

50 Citaties (Scopus)

Uittreksel

The fabrication process of ceramic microneedle arrays (MNAs) is presented. This includes the manufacturing of an SU-8/Si-master, its double replication resulting in a PDMS mold for production by micromolding and ceramic sintering. The robustness of the replicated structures was tested by means of microindentation techniques eliminating shear forces and by manual application of MNAs into silicone rubber. No damages of MNAs were observed using controlled microindentation. After the manual application, however, some microneedles were broken and left in the silicone. The opportunities and the ways to solve underlying problems of the fabrication process will be suggested and discussed. © 2011 Elsevier B.V. All rights reserved.
Originele taal-2Engels
Pagina's (van-tot)1681-1684
TijdschriftMicroelectronic Engineering
Volume88
Nummer van het tijdschrift8
DOI's
StatusGepubliceerd - 2011

Vingerafdruk

Silicones
ceramics
Fabrication
Silicone Elastomers
microhardness
silicone rubber
Rubber
fabrication
Sintering
silicones
sintering
manufacturing
shear
damage

Citeer dit

Bystrova, S.N. ; Luttge, R. / Micromolding for ceramic microneedle arrays. In: Microelectronic Engineering. 2011 ; Vol. 88, Nr. 8. blz. 1681-1684.
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abstract = "The fabrication process of ceramic microneedle arrays (MNAs) is presented. This includes the manufacturing of an SU-8/Si-master, its double replication resulting in a PDMS mold for production by micromolding and ceramic sintering. The robustness of the replicated structures was tested by means of microindentation techniques eliminating shear forces and by manual application of MNAs into silicone rubber. No damages of MNAs were observed using controlled microindentation. After the manual application, however, some microneedles were broken and left in the silicone. The opportunities and the ways to solve underlying problems of the fabrication process will be suggested and discussed. {\circledC} 2011 Elsevier B.V. All rights reserved.",
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Micromolding for ceramic microneedle arrays. / Bystrova, S.N.; Luttge, R.

In: Microelectronic Engineering, Vol. 88, Nr. 8, 2011, blz. 1681-1684.

Onderzoeksoutput: Bijdrage aan tijdschriftTijdschriftartikelAcademicpeer review

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AB - The fabrication process of ceramic microneedle arrays (MNAs) is presented. This includes the manufacturing of an SU-8/Si-master, its double replication resulting in a PDMS mold for production by micromolding and ceramic sintering. The robustness of the replicated structures was tested by means of microindentation techniques eliminating shear forces and by manual application of MNAs into silicone rubber. No damages of MNAs were observed using controlled microindentation. After the manual application, however, some microneedles were broken and left in the silicone. The opportunities and the ways to solve underlying problems of the fabrication process will be suggested and discussed. © 2011 Elsevier B.V. All rights reserved.

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DO - 10.1016/j.mee.2010.12.067

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