Methods and apparatus for calculating electromagnetic scattering properties of a structure and for reconstruction of approximate structures

Maxim Pisarenco (Uitvinder), F.S. Schneider (Uitvinder), M.G.M.M. van Kraaij (Uitvinder), M.C. van Beurden (Uitvinder)

Onderzoeksoutput: OctrooiPatent aanvraag

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Samenvatting

Disclosed is a method for reconstructing a parameter of a lithographic process. The method comprises the step of designing a preconditioner suitable for an input system comprising the difference of a first matrix and a second matrix, the first matrix being arranged to have a multi-level structure of at least three levels whereby at least two of said levels comprise a Toeplitz structure. One such preconditioner is a block-diagonal matrix comprising a BTTB structure generated from a matrix-valued inverse generating function. A second such preconditioner is determined from an approximate decomposition of said first matrix into one or more Kronecker products.
Originele taal-2Engels
IPCWO2018108503
Prioriteitsdatum13/12/16
Indieningsdatum27/11/17
StatusGepubliceerd - 21 jun 2018

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