Samenvatting
What is proposed is a method for aligning a stage in an Electro Chemical Pattern Reproduction (ECPR) process. Sensor signals (103) are received via an interface, wherein the sensor signals represent a current position of the stage (133) in sensor coordinates. A predefined position (111) of a center of gravity of the stage is provided and a current position (109) of the center of gravity of the stage is determined. The predefined and the current position of the center of gravity are compared to determine error signals (113). Based on a transformation of the error signals into actuator coordinates, actuator signals (127) are determined, wherein the actuator signals are suitable to actuate actuators (129) of the stage such that the center of gravity of the stage moves to the predefined position (137). The actuator signals are provided at an interface to the actuators.
Originele taal-2 | Engels |
---|---|
Octrooinummer | EP2336838 |
IPC | EPC |
Indieningsdatum | 11/06/11 |
Status | Gepubliceerd - 11 jun. 2011 |
Extern gepubliceerd | Ja |