Membrane couplers and photodetectors for optical interconnections on CMOS ICs

P.R.A. Binetti, X.J.M. Leijtens, M. Nikoufard, T. Vries, de, Y.S. Oei, L. Di Cioccio, J.-M. Fédéli, C. Lagahe, R. Orobtchouk, C. Seassal, P.J. Veldhoven, van, R. Nötzel, M.K. Smit

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

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Samenvatting

We introduce a compact photodetector (PD) suitable for photonic interconnections on silicon ICs. In such applications, the optical sources and detectors are linked via waveguides in an interconnection layer which is on top of CMOS circuitry. The photonic devices are fabricated with wafer scale processing steps, guaranteeing compatibility towards future generation electronic IC processing. In our approach, the optical signals propagating through the waveguides in the interconnection layer are coupled into the PDs via InP membrane waveguides. These coupling structures were designed using 3D modal analysis. Device simulation and fabrication are described in this paper.
Originele taal-2Engels
TitelProceedings of the 11th Annual Symposium of the IEEE/LEOS Benelux Chapter, 30 November - 1 December 2006, Eindhoven, The Netherlands
RedacteurenA.M.J. Koonen, X.J.M. Leijtens
Plaats van productieEindhoven
UitgeverijTechnische Universiteit Eindhoven
Pagina's237-240
ISBN van geprinte versie90-6144-989-8
StatusGepubliceerd - 2006
Evenement11th Annual Symposium of the IEEE/LEOS Benelux Chapter - Eindhoven, Nederland
Duur: 30 nov 20061 dec 2006

Congres

Congres11th Annual Symposium of the IEEE/LEOS Benelux Chapter
Land/RegioNederland
StadEindhoven
Periode30/11/061/12/06
AnderIEEE/LEOS Benelux Symposium 2006

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