Measurements of density and temperature profiles in an argon inductively coupled plasma

S. Nowak, A.C.A.P. van Lammeren, J.J.A.M. Mullen, van der, D.C. Schram, B. Sijde, van der

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Originele taal-2Engels
TitelISPC 8 : International symposium on plasma chemistry, Tokyo, August 31 - September 4, 1987, vol. 1
RedacteurenK. Akashi , A. Kinbara
Plaats van productieTokyo
Pagina's398-403
StatusGepubliceerd - 1987
Evenement8th International Symposium on Plasma Chemistry (ISPC 8) - Tokyo, Japan
Duur: 31 aug 19874 sep 1987
Congresnummer: 8

Congres

Congres8th International Symposium on Plasma Chemistry (ISPC 8)
Verkorte titelISPC/Tokyo 1987
LandJapan
StadTokyo
Periode31/08/874/09/87

Citeer dit

Nowak, S., van Lammeren, A. C. A. P., Mullen, van der, J. J. A. M., Schram, D. C., & Sijde, van der, B. (1987). Measurements of density and temperature profiles in an argon inductively coupled plasma. In K. Akashi , & A. Kinbara (editors), ISPC 8 : International symposium on plasma chemistry, Tokyo, August 31 - September 4, 1987, vol. 1 (blz. 398-403). Tokyo.
Nowak, S. ; van Lammeren, A.C.A.P. ; Mullen, van der, J.J.A.M. ; Schram, D.C. ; Sijde, van der, B. / Measurements of density and temperature profiles in an argon inductively coupled plasma. ISPC 8 : International symposium on plasma chemistry, Tokyo, August 31 - September 4, 1987, vol. 1. redacteur / K. Akashi ; A. Kinbara. Tokyo, 1987. blz. 398-403
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title = "Measurements of density and temperature profiles in an argon inductively coupled plasma",
author = "S. Nowak and {van Lammeren}, A.C.A.P. and {Mullen, van der}, J.J.A.M. and D.C. Schram and {Sijde, van der}, B.",
year = "1987",
language = "English",
pages = "398--403",
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Nowak, S, van Lammeren, ACAP, Mullen, van der, JJAM, Schram, DC & Sijde, van der, B 1987, Measurements of density and temperature profiles in an argon inductively coupled plasma. in K Akashi & A Kinbara (redactie), ISPC 8 : International symposium on plasma chemistry, Tokyo, August 31 - September 4, 1987, vol. 1. Tokyo, blz. 398-403, 8th International Symposium on Plasma Chemistry (ISPC 8), Tokyo, Japan, 31/08/87.

Measurements of density and temperature profiles in an argon inductively coupled plasma. / Nowak, S.; van Lammeren, A.C.A.P.; Mullen, van der, J.J.A.M.; Schram, D.C.; Sijde, van der, B.

ISPC 8 : International symposium on plasma chemistry, Tokyo, August 31 - September 4, 1987, vol. 1. redactie / K. Akashi ; A. Kinbara. Tokyo, 1987. blz. 398-403.

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademic

TY - GEN

T1 - Measurements of density and temperature profiles in an argon inductively coupled plasma

AU - Nowak, S.

AU - van Lammeren, A.C.A.P.

AU - Mullen, van der, J.J.A.M.

AU - Schram, D.C.

AU - Sijde, van der, B.

PY - 1987

Y1 - 1987

M3 - Conference contribution

SP - 398

EP - 403

BT - ISPC 8 : International symposium on plasma chemistry, Tokyo, August 31 - September 4, 1987, vol. 1

A2 - Akashi , K.

A2 - Kinbara, A.

CY - Tokyo

ER -

Nowak S, van Lammeren ACAP, Mullen, van der JJAM, Schram DC, Sijde, van der B. Measurements of density and temperature profiles in an argon inductively coupled plasma. In Akashi K, Kinbara A, redacteurs, ISPC 8 : International symposium on plasma chemistry, Tokyo, August 31 - September 4, 1987, vol. 1. Tokyo. 1987. blz. 398-403