Manufacturing pinhole arrays for X-ray source diagnostics using LIGA

M. Gerner; K. Holldack; R. Luttge; M. Schmidt

doi:10.1007/s005420050127

Manufacturing pinhole arrays for X-ray source diagnostics using LIGA

M. Gerner, K. Holldack, R. Luttge, M. Schmidt

Microsystems

Onderzoeksoutput: Bijdrage aan tijdschrift › Tijdschriftartikel › Academic › peer review

3 Citaten (Scopus)

Samenvatting

The manufacturing of pinhole arrays with diameters 10 µm up to 60 µm in 100-300 µm gold foils is described using LIGA. These structures are used to characterize the electron beam in a storage ring by means of the emitted synchrotron radiation. The source inside the bending magnet 13 at BESSY I (single bunch mode, 70 mA ring current, pinholes: Ø 60 µm) is (448 ± 40) µm in height and (768 ± 40)µm in horizontal width. For BESSY II pinholes with Ø 10-20 µm will be used utilizing bending magnet radiation (resolution ~ 10 µm), single pinholes with 1-5 µm in diameter are dedicated to insertion device characterization (coherence).

Originele taal-2	Engels
Pagina's (van-tot)	184-186
Tijdschrift	Microsystem Technologies
Volume	4
Nummer van het tijdschrift	4
DOI's	https://doi.org/10.1007/s005420050127
Status	Gepubliceerd - 1998

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abstract = "The manufacturing of pinhole arrays with diameters 10 µm up to 60 µm in 100-300 µm gold foils is described using LIGA. These structures are used to characterize the electron beam in a storage ring by means of the emitted synchrotron radiation. The source inside the bending magnet 13 at BESSY I (single bunch mode, 70 mA ring current, pinholes: {\O} 60 µm) is (448 ± 40) µm in height and (768 ± 40)µm in horizontal width. For BESSY II pinholes with {\O} 10-20 µm will be used utilizing bending magnet radiation (resolution ~ 10 µm), single pinholes with 1-5 µm in diameter are dedicated to insertion device characterization (coherence).",

author = "M. Gerner and K. Holldack and R. Luttge and M. Schmidt",

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AU - Holldack, K.

AU - Luttge, R.

AU - Schmidt, M.

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AB - The manufacturing of pinhole arrays with diameters 10 µm up to 60 µm in 100-300 µm gold foils is described using LIGA. These structures are used to characterize the electron beam in a storage ring by means of the emitted synchrotron radiation. The source inside the bending magnet 13 at BESSY I (single bunch mode, 70 mA ring current, pinholes: Ø 60 µm) is (448 ± 40) µm in height and (768 ± 40)µm in horizontal width. For BESSY II pinholes with Ø 10-20 µm will be used utilizing bending magnet radiation (resolution ~ 10 µm), single pinholes with 1-5 µm in diameter are dedicated to insertion device characterization (coherence).

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DO - 10.1007/s005420050127

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