Magnetic levitation systems compared to conventional bearing systems

A. T.A. Peijnenburg, J. P.M. Vermeulen, J. van Eijk

Onderzoeksoutput: Bijdrage aan tijdschriftTijdschriftartikelAcademicpeer review

31 Citaties (Scopus)

Uittreksel

So far, guide ways for positioning systems (stages) in semiconductor applications are often equipped with air bearings and/or roller bearings. Although these passive bearing systems are seemingly rather cost-effective, motion performance and motion capabilities are limited compared to active systems using multiple servo loops. So far, nm-level motion performance in 6 degrees of freedom (DoF) was realized through the application of an isolated machine architecture in combination with a hybrid stage concept, i.e., by stacking an active short stroke system providing fine adjustments on top of a passive long stroke system. This paper describes the development of a full 6-DoF active positioning system with nm-level motion performance in one single (long stroke) stage, using active magnetic bearing systems. It is shown that active bearings provide interesting advantages and additional features for substrate positioning, enabling a rather simple and cost effective stage design, suitable for next generation semiconductor applications.

Originele taal-2Engels
Pagina's (van-tot)1372-1375
Aantal pagina's4
TijdschriftMicroelectronic Engineering
Volume83
Nummer van het tijdschrift4-9
DOI's
StatusGepubliceerd - 1 apr 2006
Extern gepubliceerdJa

Vingerafdruk

Bearings (structural)
Magnetic levitation
levitation
strokes
positioning
Semiconductor materials
Roller bearings
Magnetic bearings
degrees of freedom
roller bearings
costs
magnetic bearings
gas bearings
Costs
adjusting
Substrates
Air

Citeer dit

Peijnenburg, A. T.A. ; Vermeulen, J. P.M. ; van Eijk, J. / Magnetic levitation systems compared to conventional bearing systems. In: Microelectronic Engineering. 2006 ; Vol. 83, Nr. 4-9 . blz. 1372-1375.
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Magnetic levitation systems compared to conventional bearing systems. / Peijnenburg, A. T.A.; Vermeulen, J. P.M.; van Eijk, J.

In: Microelectronic Engineering, Vol. 83, Nr. 4-9 , 01.04.2006, blz. 1372-1375.

Onderzoeksoutput: Bijdrage aan tijdschriftTijdschriftartikelAcademicpeer review

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