Magnetic levitation systems compared to conventional bearing systems

A. T.A. Peijnenburg, J. P.M. Vermeulen, J. van Eijk

Onderzoeksoutput: Bijdrage aan tijdschriftTijdschriftartikelAcademicpeer review

35 Citaten (Scopus)

Samenvatting

So far, guide ways for positioning systems (stages) in semiconductor applications are often equipped with air bearings and/or roller bearings. Although these passive bearing systems are seemingly rather cost-effective, motion performance and motion capabilities are limited compared to active systems using multiple servo loops. So far, nm-level motion performance in 6 degrees of freedom (DoF) was realized through the application of an isolated machine architecture in combination with a hybrid stage concept, i.e., by stacking an active short stroke system providing fine adjustments on top of a passive long stroke system. This paper describes the development of a full 6-DoF active positioning system with nm-level motion performance in one single (long stroke) stage, using active magnetic bearing systems. It is shown that active bearings provide interesting advantages and additional features for substrate positioning, enabling a rather simple and cost effective stage design, suitable for next generation semiconductor applications.

Originele taal-2Engels
Pagina's (van-tot)1372-1375
Aantal pagina's4
TijdschriftMicroelectronic Engineering
Volume83
Nummer van het tijdschrift4-9
DOI's
StatusGepubliceerd - 1 apr 2006
Extern gepubliceerdJa

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  • Citeer dit

    Peijnenburg, A. T. A., Vermeulen, J. P. M., & van Eijk, J. (2006). Magnetic levitation systems compared to conventional bearing systems. Microelectronic Engineering, 83(4-9 ), 1372-1375. https://doi.org/10.1016/j.mee.2006.01.248