Low-temperature aluminium oxide deposition using the extending thermal plasma technique : film properties and applications

I. Volintiru, J.L. Hemmen, van, M. Creatore, M.C.M. van de Sanden

Onderzoeksoutput: Bijdrage aan congresPoster

Samenvatting

No abstract
Originele taal-2Engels
Pagina'sB 22-
StatusGepubliceerd - 2006
Evenement18th NNV/CPS Symposium on Plasma Physics and Radiation Technology, March 22-23, 2006, Lunteren, The Netherlands - Lunteren, Nederland
Duur: 22 mrt 200623 mrt 2006

Congres

Congres18th NNV/CPS Symposium on Plasma Physics and Radiation Technology, March 22-23, 2006, Lunteren, The Netherlands
LandNederland
StadLunteren
Periode22/03/0623/03/06
Ander18th Symposium Plasma Physics and Radiation Technology, 22-23 March 2006, Lunteren, The Netherlands

Bibliografische nota

18th symposium plasma physics and radiation technology : March 22-23, 2006, Lunteren : programme and abstracts

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