Samenvatting
Application of the ion scattering spectroscopy techniques to studying materials for microelectronics are considered in detail. The main attention is paid to the low-energy ion scattering, and a comparison is given between this technique and the other methods used for studying solid surfaces. The possibilities to obtain quantitative analytical and structural information from the results of low-energy ion scattering measurements on the surface of various materials are analyzed.
Originele taal-2 | Engels |
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Pagina's (van-tot) | 789-805 |
Aantal pagina's | 17 |
Tijdschrift | Physics, Chemistry and Mechanics of Surfaces |
Volume | 8 |
Nummer van het tijdschrift | 6 |
Status | Gepubliceerd - 1993 |