Low-energy ion scattering: application to studying materials for microelectronics

H. H. Brongersma

    Onderzoeksoutput: Bijdrage aan tijdschriftTijdschriftartikelAcademicpeer review

    Samenvatting

    Application of the ion scattering spectroscopy techniques to studying materials for microelectronics are considered in detail. The main attention is paid to the low-energy ion scattering, and a comparison is given between this technique and the other methods used for studying solid surfaces. The possibilities to obtain quantitative analytical and structural information from the results of low-energy ion scattering measurements on the surface of various materials are analyzed.

    Originele taal-2Engels
    Pagina's (van-tot)789-805
    Aantal pagina's17
    TijdschriftPhysics, Chemistry and Mechanics of Surfaces
    Volume8
    Nummer van het tijdschrift6
    StatusGepubliceerd - 1993

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