Low-cost monolithic processing of large-area ultrasound transducer arrays

L.C.J.M. Peters, R. Ollearo, R.G.F.A. Verbeek, J.L.P.J. van der Steen, H.B. Akkerman, A.W.F. Volker, P.L.M.J. van Neer, G.H. Gelinck

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

Samenvatting

Large-area flexible ultrasound arrays can offer new ultrasound modalities in multiple fields. The production of these arrays when using CMOS-type fabrication techniques faces scalability challenges and costs increase dramatically when upscaled to large dimensions. We investigate the monolithic production of large-area PPT (Printed Polymer Transducer) arrays directly on a flexible substrate. Here, a vibrating membrane is defined by a circular opening in a thick photoresist layer. Since the photoresist layer is processed on top of the P(VDF-TrFE), a thin barrier layer is used to prevent diffusion into the P(VDF-TrFE). An annealing procedure is developed to reduce the surface roughness of the P(VDF-TrFE) layer and make it compatible with thin film electrode deposition. We measure a remnant polarization of 7-8 μC/cm2 and a coercive field of around 50 MV/m. Laser scanning vibrometer measurements reveal a uniform peak displacement and fundamental resonance frequency (66 kHz) across the PPT array.

Originele taal-2Engels
Titel2019 IEEE International Ultrasonics Symposium, IUS 2019
Plaats van productiePiscataway
UitgeverijIEEE Computer Society
Pagina's60-63
Aantal pagina's4
ISBN van elektronische versie9781728145969
DOI's
StatusGepubliceerd - okt 2019
Evenement2019 IEEE International Ultrasonics Symposium, IUS 2019 - Glasgow, Verenigd Koninkrijk
Duur: 6 okt 20199 okt 2019

Congres

Congres2019 IEEE International Ultrasonics Symposium, IUS 2019
LandVerenigd Koninkrijk
StadGlasgow
Periode6/10/199/10/19

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  • Citeer dit

    Peters, L. C. J. M., Ollearo, R., Verbeek, R. G. F. A., van der Steen, J. L. P. J., Akkerman, H. B., Volker, A. W. F., van Neer, P. L. M. J., & Gelinck, G. H. (2019). Low-cost monolithic processing of large-area ultrasound transducer arrays. In 2019 IEEE International Ultrasonics Symposium, IUS 2019 (blz. 60-63). [8926238] IEEE Computer Society. https://doi.org/10.1109/ULTSYM.2019.8926238