Local normal vector field formulation for polygonal building blocks in a Gabor representation

Stefan Eijsvogel; Fahimeh Sepehripour; Ligang Sun; Roeland Dilz; Martijn C. van Beurden

Local normal vector field formulation for polygonal building blocks in a Gabor representation

Stefan Eijsvogel, Fahimeh Sepehripour, Ligang Sun, Roeland Dilz, Martijn C. van Beurden

Onderzoeksoutput: Bijdrage aan congres › Abstract › Academic

66 Downloads (Pure)

Samenvatting

The usage of a spatial spectral domain integral
equation solver for electromagnetic scattering from dielectric
objects provides a means to execute scattering simulations
for lithography.We consider the extension of the local
normal vector field formulation to support polygonal building
blocks in a Gabor series representation of functions.

Originele taal-2	Engels
Pagina's	61-62
Aantal pagina's	2
Status	Gepubliceerd - 16 feb. 2020
Evenement	Scientific Computing in Electrical Engineering, SCEE 2020 - Eindhoven, the Netherlands, Eindhoven, Nederland Duur: 16 feb. 2020 → 20 feb. 2020 https://scee-conferences.org/

Congres

Congres	Scientific Computing in Electrical Engineering, SCEE 2020
Verkorte titel	SCEE 2020
Land/Regio	Nederland
Stad	Eindhoven
Periode	16/02/20 → 20/02/20
Internet adres	https://scee-conferences.org/

Toegang tot document

published versionDefinitieve gepubliceerde versie, 168 KB

Citeer dit

@conference{fb4fd39f3bb64d05923a3685e479a83b,

title = "Local normal vector field formulation for polygonal building blocks in a Gabor representation",

abstract = "The usage of a spatial spectral domain integral equation solver for electromagnetic scattering from dielectric objects provides a means to execute scattering simulations for lithography. We consider the extension of the local normal vector field formulation to support polygonal building blocks in a Gabor series representation of functions.",

author = "Stefan Eijsvogel and Fahimeh Sepehripour and Ligang Sun and Roeland Dilz and {van Beurden}, {Martijn C.}",

year = "2020",

month = feb,

day = "16",

language = "English",

pages = "61--62",

note = "Scientific Computing in Electrical Engineering, SCEE 2020 , SCEE 2020 ; Conference date: 16-02-2020 Through 20-02-2020",

url = "https://scee-conferences.org/",

}

TY - CONF

T1 - Local normal vector field formulation for polygonal building blocks in a Gabor representation

AU - Eijsvogel, Stefan

AU - Sepehripour, Fahimeh

AU - Sun, Ligang

AU - Dilz, Roeland

AU - van Beurden, Martijn C.

PY - 2020/2/16

Y1 - 2020/2/16

N2 - The usage of a spatial spectral domain integral equation solver for electromagnetic scattering from dielectric objects provides a means to execute scattering simulations for lithography. We consider the extension of the local normal vector field formulation to support polygonal building blocks in a Gabor series representation of functions.

AB - The usage of a spatial spectral domain integral equation solver for electromagnetic scattering from dielectric objects provides a means to execute scattering simulations for lithography. We consider the extension of the local normal vector field formulation to support polygonal building blocks in a Gabor series representation of functions.

M3 - Abstract

SP - 61

EP - 62

T2 - Scientific Computing in Electrical Engineering, SCEE 2020

Y2 - 16 February 2020 through 20 February 2020

ER -

Local normal vector field formulation for polygonal building blocks in a Gabor representation

Samenvatting

Congres

Toegang tot document

Vingerafdruk

Citeer dit