Lithographic apparatus stage coupling

Jens de Goeij (Uitvinder), Ron de Bruijn (Uitvinder), J.P.M.B. Vermeulen (Uitvinder), René Leenaars (Uitvinder), Bas Jansen (Uitvinder)

Onderzoeksoutput: OctrooiOctrooi-publicatie

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Samenvatting

A coupling having a variable stiffness is disclosed. The coupling comprises: a deformable component and a support being movably arranged with respect to each other, wherein the deformable component comprises a viscoelastic material and wherein the support has a recess configured to receive the deformable component, wherein the deformable component is configured to deform in volumetric deformation when, in use, a force is applied to the deformable component, and wherein a shape of the deformable component and a shape of the support are configured such that the variable stiffness gradually increases as a function of an amount of the force. A stage apparatus may comprise the coupling.
Originele taal-2Engels
OctrooinummerWO2023078788
Prioriteitsdatum11/05/23
StatusGepubliceerd - 11 mei 2023

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