Linear-time-varying feedforward control for position-dependent flexible structures

Fatemeh Sharifi; Hans Zwart; Marcel Heertjes; Nikolaos Kontaras

Linear-time-varying feedforward control for position-dependent flexible structures

Fatemeh Sharifi
, Hans Zwart
, Marcel Heertjes
, Nikolaos Kontaras

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic › peer review

Samenvatting

High performance motion systems in the semiconductor industry can achieve higher tracking accuracy when the structural dynamics of the system are taken into account. This work proposes an LTV feedforward control scheme which is based on the approximation of the system dynamics at low frequencies. The plant approximation contains both the low frequency contribution and resonance dynamics of the dominant modes. As an example of a flexible structure, the damped Euler-Bernoulli beam is investigated with considering the stable inversion of the approximated plant for feedforward control design. The results show a remarkable increase in positioning accuracy of the system being the consequence of the presence of feedforward control forces even when the reference setpoint accelerations equal zero.

Originele taal-2	Engels
Titel	European Control Conference 2020, ECC 2020
Uitgeverij	Institute of Electrical and Electronics Engineers
Pagina's	1409-1414
Aantal pagina's	6
ISBN van elektronische versie	9783907144015
Status	Gepubliceerd - 20 jul. 2020
Evenement	2020 European Control Conference, ECC 2020 - Saint Petersburg, Rusland Duur: 12 mei 2020 → 15 mei 2020

Congres

Congres	2020 European Control Conference, ECC 2020
Verkorte titel	ECC 2020
Land/Regio	Rusland
Stad	Saint Petersburg
Periode	12/05/20 → 15/05/20

Financiering

*This research has received funding from the European Unions Horizon 2020 research and innovation programme under the Marie Sklodowska-Curie grant agreement No. 765579 1 Fatemeh Sharifi is with the Faculty of Electrical Engineering, Mathematics and Computer Science, University of Twente, 7500 AE Enschede, The Netherlands [email protected] 2Hans Zwart is with the Faculty of Electrical Engineering, Mathematics and Computer Science, University of Twente, 7500 AE En-schede, The Netherlands, and Dynamics and Control group, Eindhoven University of Technology, 5612 AZ Eindhoven, The Netherlands [email protected], [email protected] 3Marcel Heertjes is with ASML, Mechatronic System Development, Veldhoven, The Netherlands, and Dynamics and Control group, Eindhoven University of Technology, 5612 AZ Eindhoven, The Netherlands [email protected], [email protected] 4Nikolaos Kontaras is with Dynamics and Control group, Eindhoven University of Technology, 5612 AZ Eindhoven, The Netherlands [email protected]

Financiers	Financiernummer
H2020 Marie Skłodowska-Curie Actions
European Union’s Horizon Europe research and innovation programme	765579
Technische Universiteit Eindhoven

Toegang tot document

https://ieeexplore.ieee.org/document/9143846

Andere bestanden en links

Link to publication in Scopus

Citeer dit

@inproceedings{7610642df6d84e5f847af694c234f10e,

title = "Linear-time-varying feedforward control for position-dependent flexible structures",

abstract = "High performance motion systems in the semiconductor industry can achieve higher tracking accuracy when the structural dynamics of the system are taken into account. This work proposes an LTV feedforward control scheme which is based on the approximation of the system dynamics at low frequencies. The plant approximation contains both the low frequency contribution and resonance dynamics of the dominant modes. As an example of a flexible structure, the damped Euler-Bernoulli beam is investigated with considering the stable inversion of the approximated plant for feedforward control design. The results show a remarkable increase in positioning accuracy of the system being the consequence of the presence of feedforward control forces even when the reference setpoint accelerations equal zero.",

author = "Fatemeh Sharifi and Hans Zwart and Marcel Heertjes and Nikolaos Kontaras",

year = "2020",

month = jul,

day = "20",

language = "English",

pages = "1409--1414",

booktitle = "European Control Conference 2020, ECC 2020",

publisher = "Institute of Electrical and Electronics Engineers",

address = "United States",

note = "2020 European Control Conference, ECC 2020, ECC 2020 ; Conference date: 12-05-2020 Through 15-05-2020",

}

Sharifi, F, Zwart, H , Heertjes, M & Kontaras, N 2020, Linear-time-varying feedforward control for position-dependent flexible structures. in European Control Conference 2020, ECC 2020., 9143846, Institute of Electrical and Electronics Engineers, blz. 1409-1414, 2020 European Control Conference, ECC 2020, Saint Petersburg, Rusland, 12/05/20. <https://ieeexplore.ieee.org/document/9143846>

Linear-time-varying feedforward control for position-dependent flexible structures. / Sharifi, Fatemeh; Zwart, Hans ; Heertjes, Marcel et al.
European Control Conference 2020, ECC 2020. Institute of Electrical and Electronics Engineers, 2020. blz. 1409-1414 9143846.

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic › peer review

TY - GEN

T1 - Linear-time-varying feedforward control for position-dependent flexible structures

AU - Sharifi, Fatemeh

AU - Zwart, Hans

AU - Heertjes, Marcel

AU - Kontaras, Nikolaos

PY - 2020/7/20

Y1 - 2020/7/20

N2 - High performance motion systems in the semiconductor industry can achieve higher tracking accuracy when the structural dynamics of the system are taken into account. This work proposes an LTV feedforward control scheme which is based on the approximation of the system dynamics at low frequencies. The plant approximation contains both the low frequency contribution and resonance dynamics of the dominant modes. As an example of a flexible structure, the damped Euler-Bernoulli beam is investigated with considering the stable inversion of the approximated plant for feedforward control design. The results show a remarkable increase in positioning accuracy of the system being the consequence of the presence of feedforward control forces even when the reference setpoint accelerations equal zero.

AB - High performance motion systems in the semiconductor industry can achieve higher tracking accuracy when the structural dynamics of the system are taken into account. This work proposes an LTV feedforward control scheme which is based on the approximation of the system dynamics at low frequencies. The plant approximation contains both the low frequency contribution and resonance dynamics of the dominant modes. As an example of a flexible structure, the damped Euler-Bernoulli beam is investigated with considering the stable inversion of the approximated plant for feedforward control design. The results show a remarkable increase in positioning accuracy of the system being the consequence of the presence of feedforward control forces even when the reference setpoint accelerations equal zero.

UR - https://www.scopus.com/pages/publications/85090119102

M3 - Conference contribution

AN - SCOPUS:85090119102

SP - 1409

EP - 1414

BT - European Control Conference 2020, ECC 2020

PB - Institute of Electrical and Electronics Engineers

T2 - 2020 European Control Conference, ECC 2020

Y2 - 12 May 2020 through 15 May 2020

ER -

Linear-time-varying feedforward control for position-dependent flexible structures

Samenvatting

Congres

Financiering

Toegang tot document

Andere bestanden en links

Vingerafdruk

Citeer dit