Laser-cooled ion source

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademic

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Samenvatting

Focused Ion Beams (FIB) are widely used in the semiconductor industry for milling, sputtering and imaging applications. In particular it is used for quality control of wafers, by using a combination of a FIB and an electron microscope to make cross-sectional inspections of wafers. In addition, FIB's are used for mask repair through gas-assisted etching.
Originele taal-2Engels
TitelProceedings of the 9th European conference on atoms molecules and photons (ECAMP 9), 6-11 May 2007, Heraklion, Greece
RedacteurenD. Charalambidis, S. Farantos, P. Lambroulos
UitgeverijEuropean Physical Society (EPS)
Pagina'sm02-06-
StatusGepubliceerd - 2007
Evenementconference; ECAMP : European conference on atoms molecules and photons ; 9 Greece, Heraklion, 6-11 May 2007; 2007-05-06; 2007-05-11 -
Duur: 6 mei 200711 mei 2007

Congres

Congresconference; ECAMP : European conference on atoms molecules and photons ; 9 Greece, Heraklion, 6-11 May 2007; 2007-05-06; 2007-05-11
Periode6/05/0711/05/07
AnderECAMP : European conference on atoms molecules and photons ; 9 Greece, Heraklion, 6-11 May 2007

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