Large-Area Scatterometry for Nanoscale Metrology

Jaime Gómez Rivas, Mohammad Ramezani, Marc Verschuuren, Gabriel Castellanos

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

Samenvatting

Many applications across photonics and semiconductor industries require the fabrication of nanostructures with non-trivial geometries with a precision and reproducibility down to the nanometer scale. Slanted gratings and metamaterials are examples of such designs that have vast applications in Augmented Reality and LiDAR. State-of-the-art lithography techniques, such as nanoimprint lithography or UV lithography, can provide such levels of fabrication precision for high-volume production. However, a rapid in-line quality inspection method for such complex patterns is required to monitor the fabrication process, verify the sample quality, and to ensure reproducibility. Here, we demonstrate a novel technique that allows us to inspect the quality of the samples in a non-destructive and fast manner, and to extract geometrical parameters of the nanostructures over large areas, generating spatial variations maps across wafers.

Originele taal-2Engels
TitelAdvanced Fabrication Technologies for Micro/Nano Optics and Photonics XVI
RedacteurenGeorg von Freymann, Eva Blasco, Debashis Chanda
UitgeverijSPIE
Aantal pagina's3
ISBN van elektronische versie9781510659711
ISBN van geprinte versie9781510659728
DOI's
StatusGepubliceerd - 15 mrt. 2023
EvenementAdvanced Fabrication Technologies for Micro/Nano Optics and Photonics XVI 2023 - San Francisco, Verenigde Staten van Amerika
Duur: 29 jan. 202331 jan. 2023

Publicatie series

NaamProceedings of SPIE
Volume12433
ISSN van geprinte versie0277-786X
ISSN van elektronische versie1996-756X

Congres

CongresAdvanced Fabrication Technologies for Micro/Nano Optics and Photonics XVI 2023
Land/RegioVerenigde Staten van Amerika
StadSan Francisco
Periode29/01/2331/01/23

Vingerafdruk

Duik in de onderzoeksthema's van 'Large-Area Scatterometry for Nanoscale Metrology'. Samen vormen ze een unieke vingerafdruk.

Citeer dit