Ion energy distributions in highly transient EUV induced plasma in hydrogen

T.H.M. van de Ven, P. Reefman, C.A. de Meijere, R.M. van der Horst, M. van Kampen, V.Y. Banine, J. Beckers

Onderzoeksoutput: Bijdrage aan tijdschriftTijdschriftartikelAcademicpeer review

6 Citaties (Scopus)

Uittreksel

This work reports on the measurements of ion flux composition and ion energy distribution functions (IEDFs) at surfaces in contact with hydrogen plasmas induced by extreme ultraviolet (EUV) radiation.
TaalEngels
Artikelnummer063301
Pagina's1-6
TijdschriftJournal of Applied Physics
Volume123
Nummer van het tijdschrift6
DOI's
StatusGepubliceerd - 14 feb 2018

Citeer dit

@article{247bfa4a34cd4a2b9b0f07cedd1af98e,
title = "Ion energy distributions in highly transient EUV induced plasma in hydrogen",
abstract = "This work reports on the measurements of ion flux composition and ion energy distribution functions (IEDFs) at surfaces in contact with hydrogen plasmas induced by extreme ultraviolet (EUV) radiation.",
author = "{van de Ven}, T.H.M. and P. Reefman and {de Meijere}, C.A. and {van der Horst}, R.M. and {van Kampen}, M. and V.Y. Banine and J. Beckers",
year = "2018",
month = "2",
day = "14",
doi = "10.1063/1.5017303",
language = "English",
volume = "123",
pages = "1--6",
journal = "Journal of Applied Physics",
issn = "0021-8979",
publisher = "American Institute of Physics",
number = "6",

}

Ion energy distributions in highly transient EUV induced plasma in hydrogen. / van de Ven, T.H.M.; Reefman, P.; de Meijere, C.A.; van der Horst, R.M.; van Kampen, M.; Banine, V.Y.; Beckers, J.

In: Journal of Applied Physics, Vol. 123, Nr. 6, 063301, 14.02.2018, blz. 1-6.

Onderzoeksoutput: Bijdrage aan tijdschriftTijdschriftartikelAcademicpeer review

TY - JOUR

T1 - Ion energy distributions in highly transient EUV induced plasma in hydrogen

AU - van de Ven,T.H.M.

AU - Reefman,P.

AU - de Meijere,C.A.

AU - van der Horst,R.M.

AU - van Kampen,M.

AU - Banine,V.Y.

AU - Beckers,J.

PY - 2018/2/14

Y1 - 2018/2/14

N2 - This work reports on the measurements of ion flux composition and ion energy distribution functions (IEDFs) at surfaces in contact with hydrogen plasmas induced by extreme ultraviolet (EUV) radiation.

AB - This work reports on the measurements of ion flux composition and ion energy distribution functions (IEDFs) at surfaces in contact with hydrogen plasmas induced by extreme ultraviolet (EUV) radiation.

U2 - 10.1063/1.5017303

DO - 10.1063/1.5017303

M3 - Article

VL - 123

SP - 1

EP - 6

JO - Journal of Applied Physics

T2 - Journal of Applied Physics

JF - Journal of Applied Physics

SN - 0021-8979

IS - 6

M1 - 063301

ER -

van de Ven THM, Reefman P, de Meijere CA, van der Horst RM, van Kampen M, Banine VY et al. Ion energy distributions in highly transient EUV induced plasma in hydrogen. Journal of Applied Physics. 2018 feb 14;123(6):1-6. 063301. Beschikbaar vanaf, DOI: 10.1063/1.5017303