@article{2adff66fbe0f4fcb9990404519cd9419,
title = "Ion channeling for strain analysis in buried nanofilms (",
abstract = "The title should have been: \{"}Ion channeling for strain anal. in buried nanofilms (",
author = "L.J.M. Selen and F.J.J. Janssen and {IJzendoorn, van}, L.J. and {Voigt, de}, M.J.A. and M.J.J. Theunissen and P.J.M. Smulders and T.J. Eijkemans",
year = "2002",
language = "English",
volume = "91",
pages = "5507--5507",
journal = "Journal of Applied Physics",
issn = "0021-8979",
publisher = "American Institute of Physics",
number = "8",
}