Integrated spectral and displacement sensors based on nanomechanical photonic crystals

Z. Zobenica, R.W. van der Heijden, M. Petruzzella, F. Pagliano, T. Xia, L. Midolo, Y. Cho, F.W.M. van Otten, A. Fiore

Onderzoeksoutput: Bijdrage aan congresAbstractAcademic

Samenvatting

We report a nanophotonic sensor where the key functionalities of actuation, sensing and read-out are integrated in the same device. It is based on electromechanically-tuneable double-membrane photonic crystal cavities, where the resonant wavelength depends on the separation between the membranes. The output is provided directly in the form of a current, removing the need for external optical read-out. It can be used to measure the spectrum of incident light, to determine the wavelength of a laser line with pm-range resolution, or equivalently to measure tiny displacements. Additionally, the integrated actuation makes it suitable for applications where motion control is needed. (9755-51)
Originele taal-2Engels
StatusGepubliceerd - feb 2016
EvenementSPIE Photonics West 2016, Quantum Sensing and Nano Electronics and Photonics XIII - San Francisco, Verenigde Staten van Amerika
Duur: 13 feb 201618 feb 2016

Congres

CongresSPIE Photonics West 2016, Quantum Sensing and Nano Electronics and Photonics XIII
LandVerenigde Staten van Amerika
StadSan Francisco
Periode13/02/1618/02/16

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