Integrated optomechanical displacement sensor based on a photonic crystal cavity

Federico Galeotti, Ivana Sersic-Vollenbroek, Maurangelo Petruzzella, Francesco Pagliano, Zarko Zobenica, Frank W.M. van Otten, Hamed Sadeghian Marnani, Rob van der Heijden, Andrea Fiore

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/CongresprocedureConferentiebijdrageAcademicpeer review

2 Citaten (Scopus)
7 Downloads (Pure)

Samenvatting

Displacement sensing at the nanoscale is required in many applications, including accelerometry, mass sensing and atomic force microscopy. Miniaturization of the sensing elements and integration of the read-out is key in achieving low cost, high resolution and high speed. Here, we present a novel integrated nano-opto-electro-mechanical device which potentially has subnanometer resolution for displacement sensing. The proposed device is a waveguide-coupled, micron-sized, double membrane photonic crystal cavity with integrated electro-optical read-out on a single chip.

Originele taal-2Engels
TitelInternational Conference on Optical MEMS and Nanophotonics, OMN 2018 - Proceedings
UitgeverijIEEE Computer Society
ISBN van geprinte versie9781509063727
DOI's
StatusGepubliceerd - 4 sep 2018
Evenement23rd International Conference on Optical MEMS and Nanophotonics, OMN 2018 - Lausanne, Zwitserland
Duur: 29 jul 20182 aug 2018

Congres

Congres23rd International Conference on Optical MEMS and Nanophotonics, OMN 2018
LandZwitserland
StadLausanne
Periode29/07/182/08/18

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