Integrated Microheaters for In-Situ Flying-Height Control of Sliders Used in Hard-Disk Drives

P. Mächtle, R. Berger, A.H. Dietzel, M. Despont, W. Häberle, G.K. Binnig, P. Vettiger

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic › peer review

Originele taal-2	Engels
Titel	MEMS 2001, 14th IEEE International Conference on Micro Electro Mechanical Systems
Plaats van productie	Switzerland, Interlaken
Status	Gepubliceerd - 2001

Citeer dit

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title = "Integrated Microheaters for In-Situ Flying-Height Control of Sliders Used in Hard-Disk Drives",

author = "P. M{\"a}chtle and R. Berger and A.H. Dietzel and M. Despont and W. H{\"a}berle and G.K. Binnig and P. Vettiger",

year = "2001",

language = "English",

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Integrated Microheaters for In-Situ Flying-Height Control of Sliders Used in Hard-Disk Drives. / Mächtle, P.; Berger, R.; Dietzel, A.H. et al.
MEMS 2001, 14th IEEE International Conference on Micro Electro Mechanical Systems. Switzerland, Interlaken, 2001.

Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic › peer review

TY - GEN

T1 - Integrated Microheaters for In-Situ Flying-Height Control of Sliders Used in Hard-Disk Drives

AU - Mächtle, P.

AU - Berger, R.

AU - Dietzel, A.H.

AU - Despont, M.

AU - Häberle, W.

AU - Binnig, G.K.

AU - Vettiger, P.

PY - 2001

Y1 - 2001

M3 - Conference contribution

BT - MEMS 2001, 14th IEEE International Conference on Micro Electro Mechanical Systems

CY - Switzerland, Interlaken

ER -