Samenvatting
In recent years, several on-chip MEMS switches on silicon photonics have been reported [1, 2]. These switches require tens of volts for the actuation, which is challenging for their application in photonic integrated circuits. In this abstract we present an on-chip MEMS Mach-Zehnder Interferometer, which presents a switching voltage of 4.4V with an extinction ratio above 15dB within a bandwidth of 34nm in the C-band. While the design can be implemented on different platforms as well, we use a InP membrane on a silicon substrate by an adhesive bonding technique [3], which provides the possibility to integrate our device with active components (amplifiers, lasers, detectors) on a single chip.
Originele taal-2 | Engels |
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Titel | 2019 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2019 |
Plaats van productie | Piscataway |
Uitgeverij | Institute of Electrical and Electronics Engineers |
Aantal pagina's | 1 |
ISBN van elektronische versie | 978-1-7281-0469-0 |
DOI's | |
Status | Gepubliceerd - 1 jun. 2019 |
Evenement | 2019 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2019 - Munich, Duitsland Duur: 23 jun. 2019 → 27 jun. 2019 |
Congres
Congres | 2019 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2019 |
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Land/Regio | Duitsland |
Stad | Munich |
Periode | 23/06/19 → 27/06/19 |