Uittreksel
In recent years, several on-chip MEMS switches on silicon photonics have been reported [1, 2]. These switches require tens of volts for the actuation, which is challenging for their application in photonic integrated circuits. In this abstract we present an on-chip MEMS Mach-Zehnder Interferometer, which presents a switching voltage of 4.4V with an extinction ratio above 15dB within a bandwidth of 34nm in the C-band. While the design can be implemented on different platforms as well, we use a InP membrane on a silicon substrate by an adhesive bonding technique [3], which provides the possibility to integrate our device with active components (amplifiers, lasers, detectors) on a single chip.
| Originele taal-2 | Engels |
|---|---|
| Titel | 2019 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2019 |
| Plaats van productie | Piscataway |
| Uitgeverij | Institute of Electrical and Electronics Engineers |
| Aantal pagina's | 1 |
| ISBN van elektronische versie | 978-1-7281-0469-0 |
| DOI's | |
| Status | Gepubliceerd - 1 jun 2019 |
| Evenement | 2019 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2019 - Munich, Duitsland Duur: 23 jun 2019 → 27 jun 2019 |
Congres
| Congres | 2019 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2019 |
|---|---|
| Land | Duitsland |
| Stad | Munich |
| Periode | 23/06/19 → 27/06/19 |
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InP MEMS Mach-Zehnder interferometer optical switch on silicon. / Liu, Tianran; Pagliano, Francesco; van Veldhoven, René; Pogoretskii, Vadim; Jiao, Yuqing; Fiore, Andrea.
2019 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2019. Piscataway : Institute of Electrical and Electronics Engineers, 2019. 8872336.Onderzoeksoutput: Hoofdstuk in Boek/Rapport/Congresprocedure › Conferentiebijdrage › Academic › peer review
TY - GEN
T1 - InP MEMS Mach-Zehnder interferometer optical switch on silicon
AU - Liu, Tianran
AU - Pagliano, Francesco
AU - van Veldhoven, René
AU - Pogoretskii, Vadim
AU - Jiao, Yuqing
AU - Fiore, Andrea
PY - 2019/6/1
Y1 - 2019/6/1
N2 - In recent years, several on-chip MEMS switches on silicon photonics have been reported [1, 2]. These switches require tens of volts for the actuation, which is challenging for their application in photonic integrated circuits. In this abstract we present an on-chip MEMS Mach-Zehnder Interferometer, which presents a switching voltage of 4.4V with an extinction ratio above 15dB within a bandwidth of 34nm in the C-band. While the design can be implemented on different platforms as well, we use a InP membrane on a silicon substrate by an adhesive bonding technique [3], which provides the possibility to integrate our device with active components (amplifiers, lasers, detectors) on a single chip.
AB - In recent years, several on-chip MEMS switches on silicon photonics have been reported [1, 2]. These switches require tens of volts for the actuation, which is challenging for their application in photonic integrated circuits. In this abstract we present an on-chip MEMS Mach-Zehnder Interferometer, which presents a switching voltage of 4.4V with an extinction ratio above 15dB within a bandwidth of 34nm in the C-band. While the design can be implemented on different platforms as well, we use a InP membrane on a silicon substrate by an adhesive bonding technique [3], which provides the possibility to integrate our device with active components (amplifiers, lasers, detectors) on a single chip.
UR - http://www.scopus.com/inward/record.url?scp=85074662941&partnerID=8YFLogxK
U2 - 10.1109/CLEOE-EQEC.2019.8872336
DO - 10.1109/CLEOE-EQEC.2019.8872336
M3 - Conference contribution
AN - SCOPUS:85074662941
BT - 2019 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2019
PB - Institute of Electrical and Electronics Engineers
CY - Piscataway
ER -