InP MEMS Mach-Zehnder interferometer optical switch on silicon

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Samenvatting

In recent years, several on-chip MEMS switches on silicon photonics have been reported [1, 2]. These switches require tens of volts for the actuation, which is challenging for their application in photonic integrated circuits. In this abstract we present an on-chip MEMS Mach-Zehnder Interferometer, which presents a switching voltage of 4.4V with an extinction ratio above 15dB within a bandwidth of 34nm in the C-band. While the design can be implemented on different platforms as well, we use a InP membrane on a silicon substrate by an adhesive bonding technique [3], which provides the possibility to integrate our device with active components (amplifiers, lasers, detectors) on a single chip.

Originele taal-2Engels
Titel2019 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2019
Plaats van productiePiscataway
UitgeverijInstitute of Electrical and Electronics Engineers
Aantal pagina's1
ISBN van elektronische versie978-1-7281-0469-0
DOI's
StatusGepubliceerd - 1 jun 2019
Evenement2019 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2019 - Munich, Duitsland
Duur: 23 jun 201927 jun 2019

Congres

Congres2019 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2019
LandDuitsland
StadMunich
Periode23/06/1927/06/19

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Citeer dit

Liu, T., Pagliano, F., van Veldhoven, R., Pogoretskii, V., Jiao, Y., & Fiore, A. (2019). InP MEMS Mach-Zehnder interferometer optical switch on silicon. In 2019 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2019 [8872336] Piscataway: Institute of Electrical and Electronics Engineers. https://doi.org/10.1109/CLEOE-EQEC.2019.8872336