Infrared gas phase study on plasma-polymer interactions in high-current diffuse dielectric barrier discharge

Y. Liu, S. Welzel, S.A. Starostin, M.C.M. van de Sanden, R. Engeln, H.W. de Vries

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Uittreksel

A roll-to-roll high-current diffuse dielectric barrier discharge at atmospheric pressure was operated in air and Ar/N2/O2 gas mixtures. The exhaust gas from the discharge was studied using a high-resolution Fourier-transform infrared spectrometer in the range from 3000 to 750 cm-1 to unravel the plasma-polymer interactions. The absorption features of HxNyOz, COx, and HCOOH (formic acid) were identified, and the relative densities were deduced by fitting the absorption bands of the detected molecules. Strong interactions between plasma and polymer (Polyethylene-2,6-naphthalate, or PEN) in precursor-free oxygen-containing gas mixtures were observed as evidenced by a high COx production. The presence of HCOOH in the gas effluent, formed through plasma-chemical synthesis of COx, turns out to be a sensitive indicator for etching. By adding tetraethylorthosilicate precursor in the plasma, dramatic changes in the COx production were measured, and two distinct deposition regimes were identified. At high precursor flows, a good agreement with the precursor combustion and the COx production was observed, whereas at low precursor flows an etching-deposition regime transpires, and the COx production is dominated by polymer etching.

Originele taal-2Engels
Artikelnummer243301
TijdschriftJournal of Applied Physics
Volume121
Nummer van het tijdschrift24
DOI's
StatusGepubliceerd - 28 jun 2017

Vingerafdruk

high current
vapor phases
polymers
etching
gas mixtures
interactions
exhaust gases
effluents
infrared spectrometers
formic acid
polyethylenes
atmospheric pressure
absorption spectra
high resolution
air
oxygen
synthesis
gases
molecules

Citeer dit

@article{947ca62c86884602b7279572a1eba3cc,
title = "Infrared gas phase study on plasma-polymer interactions in high-current diffuse dielectric barrier discharge",
abstract = "A roll-to-roll high-current diffuse dielectric barrier discharge at atmospheric pressure was operated in air and Ar/N2/O2 gas mixtures. The exhaust gas from the discharge was studied using a high-resolution Fourier-transform infrared spectrometer in the range from 3000 to 750 cm-1 to unravel the plasma-polymer interactions. The absorption features of HxNyOz, COx, and HCOOH (formic acid) were identified, and the relative densities were deduced by fitting the absorption bands of the detected molecules. Strong interactions between plasma and polymer (Polyethylene-2,6-naphthalate, or PEN) in precursor-free oxygen-containing gas mixtures were observed as evidenced by a high COx production. The presence of HCOOH in the gas effluent, formed through plasma-chemical synthesis of COx, turns out to be a sensitive indicator for etching. By adding tetraethylorthosilicate precursor in the plasma, dramatic changes in the COx production were measured, and two distinct deposition regimes were identified. At high precursor flows, a good agreement with the precursor combustion and the COx production was observed, whereas at low precursor flows an etching-deposition regime transpires, and the COx production is dominated by polymer etching.",
author = "Y. Liu and S. Welzel and S.A. Starostin and {van de Sanden}, M.C.M. and R. Engeln and {de Vries}, H.W.",
year = "2017",
month = "6",
day = "28",
doi = "10.1063/1.4985619",
language = "English",
volume = "121",
journal = "Journal of Applied Physics",
issn = "0021-8979",
publisher = "American Institute of Physics",
number = "24",

}

Infrared gas phase study on plasma-polymer interactions in high-current diffuse dielectric barrier discharge. / Liu, Y.; Welzel, S.; Starostin, S.A.; van de Sanden, M.C.M.; Engeln, R.; de Vries, H.W.

In: Journal of Applied Physics, Vol. 121, Nr. 24, 243301, 28.06.2017.

Onderzoeksoutput: Bijdrage aan tijdschriftTijdschriftartikelAcademicpeer review

TY - JOUR

T1 - Infrared gas phase study on plasma-polymer interactions in high-current diffuse dielectric barrier discharge

AU - Liu, Y.

AU - Welzel, S.

AU - Starostin, S.A.

AU - van de Sanden, M.C.M.

AU - Engeln, R.

AU - de Vries, H.W.

PY - 2017/6/28

Y1 - 2017/6/28

N2 - A roll-to-roll high-current diffuse dielectric barrier discharge at atmospheric pressure was operated in air and Ar/N2/O2 gas mixtures. The exhaust gas from the discharge was studied using a high-resolution Fourier-transform infrared spectrometer in the range from 3000 to 750 cm-1 to unravel the plasma-polymer interactions. The absorption features of HxNyOz, COx, and HCOOH (formic acid) were identified, and the relative densities were deduced by fitting the absorption bands of the detected molecules. Strong interactions between plasma and polymer (Polyethylene-2,6-naphthalate, or PEN) in precursor-free oxygen-containing gas mixtures were observed as evidenced by a high COx production. The presence of HCOOH in the gas effluent, formed through plasma-chemical synthesis of COx, turns out to be a sensitive indicator for etching. By adding tetraethylorthosilicate precursor in the plasma, dramatic changes in the COx production were measured, and two distinct deposition regimes were identified. At high precursor flows, a good agreement with the precursor combustion and the COx production was observed, whereas at low precursor flows an etching-deposition regime transpires, and the COx production is dominated by polymer etching.

AB - A roll-to-roll high-current diffuse dielectric barrier discharge at atmospheric pressure was operated in air and Ar/N2/O2 gas mixtures. The exhaust gas from the discharge was studied using a high-resolution Fourier-transform infrared spectrometer in the range from 3000 to 750 cm-1 to unravel the plasma-polymer interactions. The absorption features of HxNyOz, COx, and HCOOH (formic acid) were identified, and the relative densities were deduced by fitting the absorption bands of the detected molecules. Strong interactions between plasma and polymer (Polyethylene-2,6-naphthalate, or PEN) in precursor-free oxygen-containing gas mixtures were observed as evidenced by a high COx production. The presence of HCOOH in the gas effluent, formed through plasma-chemical synthesis of COx, turns out to be a sensitive indicator for etching. By adding tetraethylorthosilicate precursor in the plasma, dramatic changes in the COx production were measured, and two distinct deposition regimes were identified. At high precursor flows, a good agreement with the precursor combustion and the COx production was observed, whereas at low precursor flows an etching-deposition regime transpires, and the COx production is dominated by polymer etching.

UR - http://www.scopus.com/inward/record.url?scp=85021453605&partnerID=8YFLogxK

U2 - 10.1063/1.4985619

DO - 10.1063/1.4985619

M3 - Article

AN - SCOPUS:85021453605

VL - 121

JO - Journal of Applied Physics

JF - Journal of Applied Physics

SN - 0021-8979

IS - 24

M1 - 243301

ER -